한국기계가공학회지 (Journal of the Korean Society of Manufacturing Process Engineers)

  • 제19권2호
  • /
  • Pages.69-74
  • /
  • 2020
  • /
  • 1598-6721(pISSN)
  • /
  • 2288-0771(eISSN)
한국기계가공학회 (The Korean Society of Manufacturing Process Engineers)
권호 표지
DOI QR코드

DOI QR Code

비접촉 변위센서를 이용한 초소형렌즈 정밀금형 형상측정

Precision Surface Profiling of Lens Molds using a Non-contact Displacement Sensor

  • 강승훈 (서울과학기술대학교 기계시스템디자인공학과) ;
  • 장대윤 (서울과학기술대학교 기계시스템디자인공학과) ;
  • 이주형 (서울과학기술대학교 기계시스템디자인공학과)
  • Kang, Seung-Hoon (Department of Mechanical System and Design Engineering, Seoul National University of Science and Technology) ;
  • Jang, Dae-Yoon (Department of Mechanical System and Design Engineering, Seoul National University of Science and Technology) ;
  • Lee, Joohyung (Department of Mechanical System and Design Engineering, Seoul National University of Science and Technology)
  • 투고 : 2019.12.03
  • 심사 : 2019.12.22
  • 발행 : 2020.02.29
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

In this study, we proposed a method for surface profiling aspheric lens molds using a precision displacement sensor with a spatial scanning mechanism. The precision displacement sensor is based on the confocal principle using a broadband light source, providing a 10 nm resolution over a 0.3 mm measurable range. The precision of the sensor, depending on surface slope, was evaluated via Allan deviation analysis. We then developed an automatic surface profiling system by measuring the cross-sectional profile of a lens mold. The precision of the sensor at the flat surface was 10 nm at 10 ms averaging time, while 200 ms averaging time was needed for identical precision at the steepest slope at 25 deg. When we compared the measurement result of the lens mold to a commercial surface profiler, we found that the accuracy of the developed system was less than 90 nm (in terms of 3 sigmas of error) between the two results.

키워드

참고문헌

  1. Zhang, Z., Yan, J., Kuriyagawa, T, "Manufacturing technologies toward extreme precision", International Journal of Extreme Manufacturing, Vol. 1, No. 2, 2019.
  2. Pongs, G., Bresseler, B., Bergs, T., and Menke, G., "Precision molding of advanced glass optics: innovative production technology for lens arrays and free form optics", In Polymer Optics and Molded Glass Optics: Design, Fabrication, and Materials II, Vol. 8489, 2012.
  3. Tohme, Y. E., "Grinding aspheric and freeform micro-optical molds", Proc. SPIE 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII, Vol. 6462, 2007.
  4. Liu, L., Cheng, X., and Hao. Q., "Fabrication process and measurement of injection molding aspheric lens", Proc. SPIE 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation, Vol. 110533, 2019.
  5. Aguirre, D., Díaz-Uribe, R., Campos, M., and Mendoza, B., "Precision Glass Molded Lenses Analysis via Null-Screen Test", In Journal of Physics: Conference Series, Vol. 1221, 2019.
  6. Jürgen, P. and Berger, G., "Non-contact profiling for high precision fast asphere topology measurement," Proc. SPIE 8788, Optical Measurement Systems for Industrial Inspection VIII, Vol. 8788, 2013.
  7. Bugg, C. D., "Noncontact surface profiling using a novel capacitive technique: scanning capacitance microscopy," In Commercial Applications of Precision Manufacturing at the Sub-Micron Level, Vol. 1573, 1992.
  8. Hand, D. P., Carolan, T. A., Barton, J. S., and Jones, J. D. C., "Profile measurement of optically rough surfaces by fiber-optic interferometry," Optics letters, Vol. 18, No. 16, pp. 1361-1363, 1993. https://doi.org/10.1364/OL.18.001361
  9. Wyant, J. C. and O'Neill, P. K., "Computer Generated Hologram; Null Lens Test of Aspheric Wavefronts," Applied optics, Vol. 13, No. 12, pp. 2762-2765, 1974. https://doi.org/10.1364/AO.13.002762
  10. Reichelt, S., Pruss, C. and Tiziani, H. J., "New design techniques and calibration methods for CGH-null testing of aspheric surfaces," Proc. SPIE, Vol. 4778, Interferometry XI, 2002.
  11. Arnold, S. M. and Kestner, R., "Verification and certification of CGH aspheric nulls," Proc. SPIE, Optical Manufacturing and Testing, Vol. 2536, pp. 117-126, 1995.
  12. Kohno, T., Matsumoto, D., Yazawa, T., and Uda, Y., "Radial shearing interferometer for in-process measurement of diamond turning", Optical Engineering, Vol. 39, No. 10, pp. 2696-2699, 1997. https://doi.org/10.1117/1.1290463
  13. Browne, M. A. and Akinyemi, A. B., "Confocal Surface Profiling Utilizing Chromatic Aberration", SCANNING, Vol. 14, No. 3, pp. 145-153, 1992. https://doi.org/10.1002/sca.4950140304
  14. Birch, K. P., "Optical fringe subdivision with nanometric accuracy", Precision Engineering, Vol. 12, No. 4, pp.195-198, 1990. https://doi.org/10.1016/0141-6359(90)90060-C
  15. Allan, D., "Statistics of Atomic Frequency Standards", Proceedings of the IEEE, Vol. 54, No. 2, pp. 221-230, 1966. https://doi.org/10.1109/PROC.1966.4634
  16. Conroy, M., and Armstrong J., "A comparison of surface metrology techniques", Journal of Physics Conference Series, Vol. 13, No. 1, pp. 458-465, 2005. https://doi.org/10.1088/1742-6596/13/1/106