저온폴리실리콘 (LTPS) TFT 기술 동향

  • 정병호 (고려대학교 디스플레이반도체물리학부) ;
  • 강민진 (고려대학교 디스플레이반도체물리학부) ;
  • 박태상 (고려대학교 디스플레이반도체물리학부)
  • Published : 2019.06.30

Abstract

Keywords

References

  1. H. J. Kim and James S. Im, Appl. Phys. Lett. 68, 1513 (1996). https://doi.org/10.1063/1.115683
  2. J. S. Im, H. J. Kim and M. O. Thompson, Appl. Phys. Lett. 63, 1969 (1993). https://doi.org/10.1063/1.110617
  3. T. Noguchi, Phys. Stat. Sol. (c) 5, 3259 (2008). https://doi.org/10.1002/pssc.200779502
  4. P. C. van der Wilt, Dig. SID 149 (2014).
  5. C.W. Kim, J.G. Jung, J.B. Choi, D.H. Kim, C. Yi, H.D. Kim, Y.H. Choi and J. Im, Dig. SID 862 (2011).
  6. T. Goto, K. Saito, F. Imaizumi, M. Hatanake, M. Takimoto, M. Mizumura, J. Gotoh, H. Ikenoue and S. Sugawa, IEEE Trans. Elect. Devices 65, 3250 (2018). https://doi.org/10.1109/TED.2018.2846412
  7. M. He, R. Ishihara, W. Metselaar, and K. Beenakker, J. Appl. Phys. 100, 083103 (2006). https://doi.org/10.1063/1.2358405
  8. S. Horita, H. Kaki and K. Nishioka, J. Appl. Phys. 102, 013501 (2007). https://doi.org/10.1063/1.2751085
  9. S. Horita, Y. Nakata and A. Shimoyama, Appl. Phys. Lett. 78, 2250 (2001). https://doi.org/10.1063/1.1362336
  10. L. Hong, X. Wang, Rusli, H. Wang, H. Zheng and H. Yu, J. Appl. Phys. 111, 043106 (2012). https://doi.org/10.1063/1.3686612
  11. 김현재 외, KIDS TFT 집중강좌 (2016).
  12. R. F. Wood and G. A. Geist, Phys. Rev. B 34, 2606 (1986). https://doi.org/10.1103/PhysRevB.34.2606
  13. S. L. Chuang and J. A. Kong, Proc. of the IEEE 69, 1132 (1981). https://doi.org/10.1109/PROC.1981.12128
  14. Z. Guosheng, P. M. Fauchet and A. E. Siegman, Phys. Rev. B 26, 5366 (1982). https://doi.org/10.1103/PhysRevB.26.5366
  15. J. E. Sipe, J. F. Young, J. S. Preston and H. M. van Driel, Phys. Rev. B 27, 1141 (1983). https://doi.org/10.1103/PhysRevB.27.1141
  16. J. Bonse, S. Hohm, S. V. Kirner, A. Rosenfeld and J. Kruger, IEEE J. of Sel. Top. Quantum Electronics 23, 9000615 (2017).
  17. M. Huang, F. Zhao, Y. Cheng, N. Xu and Z. Xu, Optics Express 18, A600 (2010). https://doi.org/10.1364/OE.18.00A600
  18. O. N. Prudnikov, S. T. Shin and B. H. Cheong, AIP Advances 7, 125102 (2017). https://doi.org/10.1063/1.4998221