Improvement of PS Measurement by Phase Compensation Method and Profile Fitting Method in White Light Phase Shifting Interferometry : Retraction

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Ku, Dong Hun (School of Mechanical and Aerospace Engineering, Seoul National University) ;
Lee, Sun Mi (School of Mechanical and Aerospace Engineering, Seoul National University) ;
Roh, Ha Na (School of Mechanical and Aerospace Engineering, Seoul National University) ;
Kim, Tai-Wook (Department of Mechatronics, Daelim University College) ;
Pahk, Heui Jae (School of Mechanical and Aerospace Engineering, Seoul National University)

D. H. Ku, S. M. Lee, H. N. Roh, T.-W. Kim, and H. J. Pahk, "Improvement of PS measurement by phase compensation method and profile fitting method in white light phase shifting interferometry," Curr. Opt. Photon. 2, 340-347 (2018) https://doi.org/10.3807/copp.2018.2.4.340