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The Korean Ceramic Society (한국세라믹학회)
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Piezoelectric Thin Films for Microtransducer

마이크로 트랜스듀서를 위한 압전 박막 소재 기술 동향

  • Jung, Soo Young (Center for Electronic Materials, Post-Silicon Institute, Korea Institute of Science and Technology) ;
  • Baek, Seung-Hyub (Center for Electronic Materials, Post-Silicon Institute, Korea Institute of Science and Technology)
  • 정수영 (한국과학기술연구원, 차세대반도체연구소 전자재료연구단) ;
  • 백승협 (한국과학기술연구원, 차세대반도체연구소 전자재료연구단)
  • Received : 2019.03.05
  • Accepted : 2019.03.22
  • Published : 2019.03.30
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Abstract

Piezoelectric materials can directly convert mechanical energy to electrical one, and vice versa. Research on piezoelectric materials and devices has a long history, and now many relevant products are available in a wide range of applications such as medical, military, industrial, home appliance, and mobile electronics. One of the major research trends now is not only to further improve the physical properties of the piezoelectric materials, but also to reduce the size of the piezoelectric devices. This review focuses on the development of piezoelectric thin films that can enhance the performance of microtransducers.

Keywords

References

  1. Qiu, Y., Gigliotti, J., Wallace, M., Griggio, F., Demore, C., Cochran, S., Trolier-McKinstry, S. "Piezoelectric micromachined ultrasound transducer (PMUT) arrays for integrated sensing, actuation and imaging." Sensors, 15 [4], 8020-8041 (2015) https://doi.org/10.3390/s150408020
  2. Zhang, S., Li, F., Jiang, X., Kim, J., Luo, J., Geng, X. "Advantages and challenges of relaxor-$PbTiO_3$ ferroelectric crystals for electroacoustic transducers-A review." Progress in materials science, 68, 1-66 (2015) https://doi.org/10.1016/j.pmatsci.2014.10.002
  3. Mulyono, D., Jinn, H. S. "A study of finger vein biometric for personal identification." pp. 1-8 In 2008 International Symposium on Biometrics and Security Technologies. IEEE. (2008)
  4. Jiang, X., Kim, J., Kim, K. "Relaxor-PT single crystal piezoelectric sensors." Crystals, 4 [3], 351-376 (2014) https://doi.org/10.3390/cryst4030351
  5. Jung, J., Lee, W., Kang, W., Shin, E., Ryu, J., Choi, H. "Review of piezoelectric micromachined ultrasonic transducers and their applications." Journal of Micromechanics and Microengineering, 27 [11], 113001 (2017) https://doi.org/10.1088/0960-1317/27/11/113001
  6. Muralt, P., J. Baborowski. "Micromachined ultrasonic transducers and acoustic sensors based on piezoelectric thin films." Journal of electroceramics 12 [1-2], 101-108 (2004) https://doi.org/10.1023/B:JECR.0000034004.99355.8b
  7. Dausch, D. E., Castellucci, J. B., Chou, D. R., Von Ramm, O. T. "Theory and operation of 2-D array piezoelectric micromachined ultrasound transducers." ieee transactions on ultrasonics, ferroelectrics, and frequency control 55 [11], 2484-2492 (2008) https://doi.org/10.1109/TUFFC.956
  8. Hajati, A., Latev, D., Gardner, D., Hajati, A., Imai, D., Torrey, M., Schoeppler, M. "Three-dimensional micro electromechanical system piezoelectric ultrasound transducer." Applied Physics Letters 101 [25], 253101 (2012) https://doi.org/10.1063/1.4772469
  9. Dausch, D. E., Gilchrist, K. H., Carlson, J. B., Hall, S. D., Castellucci, J. B., von Ramm, O. T. "In vivo real-time 3-D intracardiac echo using PMUT arrays." IEEE transactions on ultrasonics, ferroelectrics, and frequency control 61 [10], 1754-1764 (2014) https://doi.org/10.1109/TUFFC.2014.006452
  10. Hong, E., Trolier-McKinstry, S., Smith, R., Krishnaswamy, S. V., Freidhoff, C. B. "Vibration of micromachined circular piezoelectric diaphragms." IEEE transactions on ultrasonics, ferroelectrics, and frequency control 53 [4], 697-706 (2006) https://doi.org/10.1109/TUFFC.2006.1621496
  11. Klee, M., Mauczok, R., van Heesch, C., Boots, H., de Wild, M., op het Veld, B., Mleczko, M. "Piezoelectric thin film platform for ultrasound transducer arrays." pp. 196-199, 2011 IEEE International Ultrasonics Symposium. IEEE, 2011.
  12. Klee, M., Boots, H., Kumar, B., Van Heesch, C., Mauczok, R., Keur, W., Van Leuken, L. "Ferroelectric and piezoelectric thin films and their applications for integrated capacitors, piezoelectric ultrasound transducers and piezoelectric switches." IOP Conference Series: Materials Science and Engineering. Vol. 8. No. 1. IOP Publishing, 2010.
  13. Shelton, S., Chan, M. L., Park, H., Horsley, D., Boser, B., Izyumin, I., ... & Sammoura, F. "CMOScompatible AlN piezoelectric micromachined ultrasonic transducers." pp. 402-405, 2009 ieee international ultrasonics symposium. IEEE, 2009.
  14. Jung, J., Kim, S., Lee, W., Choi, H. "Fabrication of a two-dimensional piezoelectric micromachined ultrasonic transducer array using a top-crossoverto-bottom structure and metal bridge connections." Journal of Micromechanics and Microengineering 23 [12], 125037 (2013) https://doi.org/10.1088/0960-1317/23/12/125037
  15. Mo, J. H., Fowlkes, J. B., Robinson, A. L., Carson, P. L. "Crosstalk reduction with a micromachined diaphragm structure for integrated ultrasound transducer arrays." IEEE transactions on ultrasonics, ferroelectrics, and frequency control 39 [1], 48-53 (1992) https://doi.org/10.1109/58.166810
  16. Gong, D., Cai, H., Xia, Y., Ma, S., Liu, H., Chiu, Y., Jin, Y. "Fabrication and characterization of AlN based Piezoelectric Micromachined Ultrasonic Transducer for contact sensing." pp. 1442-1447, In 2018 19th International Conference on Electronic Packaging Technology (ICEPT). IEEE. (2018)
  17. Percin, G., Khuri-Yakub, B. T. "Micromachined 2-D array piezoelectrically actuated flextensional transducers." 1997 IEEE Ultrasonics Symposium Proceedings. An International Symposium (Cat. No. 97CH36118). Vol. 2, pp. 959-962, IEEE, (1997)
  18. Trolier-McKinstry, S., Muralt, P. "Thin film piezoelectrics for MEMS. Journal of Electroceramics." 12 [1-2], 7-17 (2004) https://doi.org/10.1023/B:JECR.0000033998.72845.51
  19. Muralt, P. "PZT thin films for microsensors and actuators: Where do we stand?." IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 47 [4], 903-915 (2000) https://doi.org/10.1109/58.852073
  20. Wang, S. J., Ong, C. K., You, L. P., & Xu, S. Y. "Epitaxial growth of yittria-stabilized zirconia oxide thin film on natively oxidized silicon wafer without an amorphous layer." Semiconductor science and technology 15 [8], 836 (2000) https://doi.org/10.1088/0268-1242/15/8/309
  21. Fork, D. K., Fenner, D. B., Connell, G. A. N., Phillips, J. M., & Geballe, T. H. "Epitaxial yttria-stabilized zirconia on hydrogen-terminated Si by pulsed laser deposition." Applied physics letters, 57 [11], 1137-1139 (1990) https://doi.org/10.1063/1.104220
  22. Wang, S. J., Ong, C. K., Xu, S. Y., Chen, P., Tjiu, W. C., Huan, A. C. H., Choi, W. K. "Electrical properties of crystalline YSZ films on silicon as alternative gate dielectrics." Semiconductor science and technology, 16 [3], L13 (2001) https://doi.org/10.1088/0268-1242/16/3/101
  23. Nguyen, M. D., Nazeer, H., Karakaya, K., Pham, S. V., Steenwelle, R., Dekkers, M., Rijnders, G. "Characterization of epitaxial Pb (Zr, Ti) $O_3$ thin films deposited by pulsed laser deposition on silicon cantilevers." Journal of micromechanics and microengineering, 20 [8], 085022 (2010) https://doi.org/10.1088/0960-1317/20/8/085022
  24. de Coux, P., Bachelet, R., Gatel, C., Warot-Fonrose, B., Fontcuberta, J., Sanchez, F. "Mechanisms of epitaxy and defects at the interface in ultrathin YSZ films on Si (001)." CrystEngComm, 14 [23], 7851- 7855 (2012) https://doi.org/10.1039/c2ce26155c
  25. Singamaneni, S.R., Prater, J.T., Narayan, J., "Multifunctional epitaxial systems on silicon substrates." Appl. Phys. Rev. 3, 031301 (2016) https://doi.org/10.1063/1.4955413
  26. Reiner, J. W., Kolpak, A. M., Segal, Y., Garrity, K. F., Ismail-Beigi, S., Ahn, C. H., Walker, F. J. "Crystalline oxides on silicon." Advanced Materials, 22 [26-27], 2919-2938 (2010) https://doi.org/10.1002/adma.200904306
  27. Dekkers, M., Nguyen, M. D., Steenwelle, R., te Riele, P. M., Blank, D. H., Rijnders, G. "Ferroelectric properties of epitaxial Pb (Zr, Ti) $O_3$ thin films on silicon by control of crystal orientation." Applied physics letters, 95 [1], 012902 (2009) https://doi.org/10.1063/1.3163057
  28. Zhou, Z., Yoshida, S., Tanaka, S. "Epitaxial PMnNPZT/ Si MEMS ultrasonic rangefinder with 2 m range at 1 V drive." Sensors and Actuators A: Physical, 266, 352-360 (2017) https://doi.org/10.1016/j.sna.2017.09.058
  29. Funakubo, H., Dekkers, M., Sambri, A., Gariglio, S., Shklyarevskiy, I., Rijnders, G. "Epitaxial PZT films for MEMS printing applications." MRS bulletin, 37 [11], 1030-1038 (2012) https://doi.org/10.1557/mrs.2012.271
  30. Zhang, S., Li, F. "High performance ferroelectric relaxor-$PbTiO_3$ single crystals: Status and perspective." Journal of Applied Physics, 111 [3], 2 (2012)
  31. Jaffe, B., R. S. Roth, S. Marzullo. "Piezoelectric properties of lead zirconate-lead titanate solidsolution ceramics." Journal of Applied Physics 25 [6], 809-810 (1954) https://doi.org/10.1063/1.1721741
  32. Haertling, Gene H. "Ferroelectric ceramics: history and technology." Journal of the American Ceramic Society 82 [4], 797-818 (1999) https://doi.org/10.1111/j.1151-2916.1999.tb01840.x
  33. Berlincourt, D. A., C. Cmolik, and H. Jaffe. "Piezoelectric properties of polycrystalline lead titanate zirconate compositions." Proceedings of the IRE 48 [2], 220-229 (1960) https://doi.org/10.1109/JRPROC.1960.287467
  34. Lou, X., Hu, X., Zhang, M., Morrison, F. D., Redfern, S. A. T., Scott, J. F. "Phase separation in lead zirconate titanate and bismuth titanate during electrical shorting and fatigue." Journal of applied physics 99 [4], 044101 (2006) https://doi.org/10.1063/1.2171783
  35. Park, S. E., & Shrout, T. R. "Ultrahigh strain and piezoelectric behavior in relaxor based ferroelectric single crystals." Journal of Applied Physics, 82 [4], 1804-1811 (1997) https://doi.org/10.1063/1.365983
  36. Sun, E., Cao, W. "Relaxor-based ferroelectric single crystals: Growth, domain engineering, characterization and applications. Progress in materials science, 65, 124-210 (2014) https://doi.org/10.1016/j.pmatsci.2014.03.006
  37. Hurle, D. T. "Mechanisms of growth of metal single crystals from the melt." Progress in Materials Science, 10 81-IN15. (1963) https://doi.org/10.1016/0079-6425(63)90009-4
  38. Zawilski, K. T., DeMattei, R. C., Feigelson, R. S. "Zone leveling of lead magnesium niobate-lead titanate crystals using RF heating." Journal of crystal growth, 277 [1-4], 393-400 (2005) https://doi.org/10.1016/j.jcrysgro.2005.01.090
  39. Baek, S. H., Park, J., Kim, D. M., Aksyuk, V., Bu, S. D., Das, R. R., Felker, D. A., Lettieri, J., Vaithyanathan, V., Bassiri-Gharb, N., Bharadwaja, S. S. N., Chen, Y. B., Sun, H. P., Jang, H. W., Kreft, D. J., Nagarajan, V., Streiffer S. K., Ramesh, R., Pan, X. Q., Trolier-McKinstry, S., Schlom, D. G., Rzchowski, M. S., Blick, R., Eom, C. B. "Giant piezoelectricity on Si for hyper-active MEMS." Science 334, 958 (2011) https://doi.org/10.1126/science.1207186
  40. Baek, S. H., Rzchowski, M. S., Aksyuk, V. A. "Giant piezoelectricity in PMN-PT thin films: Beyond PZT." MRS Bull. 37, 1022 (2012) https://doi.org/10.1557/mrs.2012.266
  41. Baek, S. H., Eom, C. B. Epitaxial integration of perovskite-based multifunctional oxides on silicon. Acta Mater. 61, 2734-2750 (2013) https://doi.org/10.1016/j.actamat.2012.09.073
  42. Koster, G., Klein, L., Siemons, W., Rijnders, G., Dodge, J. S., Eom, C. B., Blank, D. H. A., Beasley, M. R. "Structure, physical properties, and applications of SrRu$O_3$ thin films." Reviews of Modern Physics, 84 [1], 253 (2012) https://doi.org/10.1103/RevModPhys.84.253
  43. The improvement of piezoelectricity in PZT and related thin films after Paul Muralt, See https://www.petmem.eu/the-technology/processingtechnology/piezoelectric-materials/
  44. Lee, H. Y., "Development and application of highly efficient piezoelectric single crystals.(in Korean)" Ceramist, 17 [2], 7-14 (2014)
  45. Zhang, S., Lee, S. M., Kim, D. H., Lee, H. Y., Shrout, T. R. "Characterization of Mn-modified $Pb(Mg_{1/3}Nb_{2/3})$ $O_3$-PbZr$O_3$-$PbTiO_3$ single crystals for high power broad bandwidth transducers." Appl. Phys. Lett. 93, 122908 (2008) https://doi.org/10.1063/1.2992081
  46. Oh, H. T., Lee, J. Y., Lee, H. Y. "Mn-modified PMN-PZT [Pb ($Mg_{1/3}Nb_{2/3}$) $O_3$-Pb (Zr, Ti) $O_3$] single crystals for high power piezoelectric transducers." Journal of the Korean Ceramic Society, 54 [2], 150-157. (2017) https://doi.org/10.4191/kcers.2017.54.2.03
  47. Yan, Yongke, Kyung-Hoon Cho, Shashank Priya. "Piezoelectric properties and temperature stability of Mn-doped Pb $(Mg_{1/3}Nb_{2/3})-PbZrO_3-PbTiO_3$ textured ceramics." Applied Physics Letters, 100 [13], (2012)
  48. Lee, H. Y. "Development of high-performance piezoelectric single crystals by using solid-state single crystal growth (SSCG) method." Handbook of Advanced Dielectric, Piezoelectric and Ferroelectric Materials. Woodhead Publishing, 158-172. (2008)
  49. Li, F., Lin, D., Chen, Z., Cheng, Z., Wang, J., Li, C., Xu, Z., Huang, Q., Liao, X., Chen, L.Q. Shrout, T.R., Zhang, S. "Ultrahigh piezoelectricity in ferroelectric ceramics by design." Nature materials, 17 [4], 349 (2018) https://doi.org/10.1038/s41563-018-0034-4
  50. Singh, A., Chatterjee, R. "Multiferroic Properties of La-Rich BiFe$O_3$-$PbTiO_3$ Solid Solutions." Ferroelectrics, 433 [1], 180-189 (2012) https://doi.org/10.1080/00150193.2012.722462
  51. Schlom, D.G., Chen, L.Q., Fennie, C.J., Gopalan, V., Muller, D.A., Pan, X., Ramesh, R., Uecker, R. "Elastic strain engineering of ferroic oxides." MRS bull. 39, 118 (2014) https://doi.org/10.1557/mrs.2014.1
  52. Nagarajan, V., Roytburd, A., Stanishevsky, A., Prasertchoung, S., Zhao, T., Chen, L., Melngailis, J., Auciello, O., Ramesh, R., "Dynamics of ferroelastic domains in ferroelectric thin films." Nat. Mater. 2, 43 (2003) https://doi.org/10.1038/nmat800
  53. Zhang, J. X., Schlom, D. G., Chen, L. Q., Eom, C. B. "Tuning the remanent polarization of epitaxial ferroelectric thin films with strain." Applied Physics Letters, 95 [12], 122904 (2009) https://doi.org/10.1063/1.3231444
  54. Gruverman, A., Rodriguez, B.J., Kingon, A.I., Nemanich, R.J., Tagantsev, A.K., Cross, J.S. Tsukada, M. "Mechanical stress effect on imprint behavior of integrated ferroelectric capacitors." Applied Physics Letters, 83 [4], 728-730 (2003) https://doi.org/10.1063/1.1593830
  55. Zhou, Y., Chan, H. K., Lam, C. H., Shin, F. G. "Mechanisms of imprint effect on ferroelectric thin films." Journal of applied physics, 98 [2], 024111 (2005) https://doi.org/10.1063/1.1984075