References
- Heraus, Base Materials Brochure (2018)
- Corning Museum of Glass, Innovations in glass, pp. 36-7, Corning, New York : The Corning Museum of Glass 1999
- http://www.tqgj.co.jp/en/aboutus/history/ (2019.8.20.)
- Pamela O'Connor, Lecture note: Physical Properties of Glass 2: Thermal Expansion Coefficient (2015), https://slideplayer.com/user/5417601/
- https://www.qsil.com/en/material/about-fused-quartz/ (2019.8.20.)
- 무역위원회, 한국세라믹기술원, 스마트유리 산업경쟁력 조사, 무역위원회, 2010
- W. Zulehner, "Czochralski, growth of silicon", J. Crystal Growth, 65[1-3] 189-213 (1983) https://doi.org/10.1016/0022-0248(83)90051-9
- Sujit Nayak, Lecture note; Crystal Growth. (2016.6.30.) https://www.slideshare.net/SujitKumarNayak1/crystal-growth-63620916
- http://www.kkquartz.co.kr/ (2019.8.20.)
- H. Kishi, M. Fukui, and M. Morikawa, US 8,657,957 B2, Method and apparatus for manufacturing fused silica crucible and the fused silica crucible (2014)
- I. Fanderlik, Silica Glass and Its Application, pp. 175-184 Elsevier, Amsterdam, 1991
- Y. Gotoh, S. Satoh, M. Kudoh, EP 1772437 A2, Method and apparatus for manufacturing quartz glass ingot (2007)
- Thomas P. Seward III, Lecture : #18 Silica Glass Processing Part 2, http://www.lehigh.edu/imi
- 무역협회, 국내 수출입현황 자료 분석 (HS 7020001012, 반도체웨이퍼 제조에 사용되는 노용의 석영도가니)
- 한국IR협의회, 기술분석보고서(에스앤에스텍), 2019.3.7
- 한국신용평가, SK실트론(주), 2018.02.07
- KTB 투자증권, In depth; 반도체소재-소재, 2018. 8.17
- https://www.marketsandmarkets.com/Market-Reports/synthetic-quartz-market-239494363.html (2019.8.20.)
- IHS마킷, 종합반도체 시장점유율, 2018. 6. 8
- 신영증권, 2019년 반도체/디스플레이 전망, 2018. 11. 28
- ShinEtsu, Technical Data, "Synthetic Quartz Glass Substrates" https://www.microsi.com/wp-content/uploads/2016/08/Synthetic-Quartz-Glass-DataVIOSIL-SQSX.pdf (2019.8.20.)
- S. Maida and H. Otsuka, USP 8105734 B2, Titania-doped quartz glass member and making method (2012)
- 스테판 오흐스, 크라우스 베커, 한국특허 출원번호 10-2015-0134020, EUV 리소그래피 사용을 위한 고 규산 함량을 가지는 플루오르- 및 티타늄 도핑형 유리 블랭크 의 제조방법 및 이에 따라 제조된 블랭크 (2016)
- Shin-Etsu, Quartz glass Brochure (2018)
- S. Maida and H. Otsuka, USP 9346700 B2, Titaniadoped quartz glass and making method (2016)
- https://www.agc.com/products/electoric/detail/aq.html (2019.8.20.)
- S. Yajima, and H. Jinbo, USP 6018964A, Method for manufacturing quartz glass (2000)
- https://commons.wikimedia.org/wiki/File:Synthetic_silica_glass_ingot_2016_Nikon_Museum.jpg (2019.8.20.)
- http://www.tqgj.co.jp/kr/silicaglass/ (2019.8.20.)
- http://www.coorstek.co.jp/eng/products/detail/detail_28.html (2019.8.20.)
- F. Nurnberg, B. Kuehn, and K. Rollmann, "Metrology of Fused Silica", SPIE Proc. Vol. 10014, Laser-Induced Damage in Optical Materials 2016, (2016. 12.6)
-
스테판 토마스, 클라우드 베커, 한국특허 10-1922765, EUV 리소그래피에서의 사용을 위한 미러 기판용
$TiO_2-SiO_2$ 유리의 블랭크 및 그 생산을 위한 방법 (2018) - 헤인츠 파비앙, 스테판 토마스, 한국특허 10-1818830, 티타늄-도핑된 합성 석영 유리의 생산방법 (2018)
- Corning, HPFS Product Brochure (2014)
-
Corning, ULE
$^{(R)}$ Corning Code 7972 Brochure (2018) - M. S. Dobbins, and R. E. McLay, USP 5,043,002A, Method of making fused silica by decomposing siloxanes (1991)
- Momentive, Electrically fused quartz data sheet (2018)
- Technical Glass Products, INC., Fused Quartz Brochure (2018)
- http://www.kwquartz.com/index_en.html (2019.8.20.)
- http://www.quartzpacific.com/en/about/index.aspx (2019.8.20.)