Current Applied Physics

Korean Physical Society (한국물리학회)
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Gallium nitride nanoparticle synthesis using nonthermal plasma with gallium vapor

  • You, K.H. (Korea Research Institute of Standards and Science) ;
  • Kim, J.H. (Korea Research Institute of Standards and Science) ;
  • You, S.J. (Department of Physics, Chungnam National University) ;
  • Lee, H.C. (Korea Research Institute of Standards and Science) ;
  • Ruh, H. (Korea Research Institute of Standards and Science) ;
  • Seong, D.J. (Korea Research Institute of Standards and Science)
  • Received : 2018.03.21
  • Accepted : 2018.10.01
  • Published : 2018.12.31
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Abstract

Gallium nitride (GaN) nanoparticles are synthesized by the gallium particle trapping effect in a $N_2$ nonthermal plasma with metallic Ga vapor. A proposed method has an advantage of synthesized GaN nanoparticle purity because the gallium vapor from the inductively heated tungsten boat does not contain any impurity source. The synthesized particle size can be controlled by the amount of Ga vapor, which is adjusted using the plasma emission ratio of nitrogen to gallium, owing to the particle trapping effect. The synthesized nanoparticles are investigated by electron microscopy studies. High-resolution transmission electron microscopy (HRTEM) studies confirm that the synthesized GaN nanoparticles (10-40 nm) crystallize in a single-phase wurtzite structure. Room-temperature photoluminescence (PL) measurements indicate the band-edge emission of GaN at around 378 nm without yellow emission, which implies that the synthesized GaN nanoparticles have high crystallinity.

Keywords

Acknowledgement

Grant : Numerical simulation to overcome process limitations below 10 nm semiconductor, Plasma enhanced atomic-layer-deposition process and alternatives for gate spacer and multi-patterning technology

Supported by : Korea Research Institute of Standard and Science (KRISS), National Research Council of Science and Technology (NST), MOTIE (Ministry of Trade, Industry & Energy), Ministry of Science, ICT and Future Planning, Korea Institute of Energy Technology Evaluation and Planning (KETEP)

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