Acknowledgement
Supported by : MOTIE (Ministry of Trade, Industry and Energy), Hanyang University
References
- Nathan, A., Ahnood, A., Cole, M.T., Lee, S., Suzuki, Y., Hiralal, P., Bonaccorso, F., Hasan, T., Garcia-Gancedo, L., Dyadyusha, A. : Flexible electronics: the next ubiquitous platform. Proc. IEEE 100, 1486 (2012) https://doi.org/10.1109/JPROC.2012.2190168
- Fujisaki, Y., Nakata, M., Nakajima, Y., Tsuji, H., Miyakawa, M., Motomura, G., Fukagawa, H., Shimizu, T., Tsuzuki, T., Takei, T., Yamamoto, T. : Oxide/organic semiconductor electronics on plastic substrates for flexible AMOLED displays. SID Symp. Dig. Tech. Pap. 47, 633 (2016)
- Chwang, A.B., Rothman, M.A., Mao, S.Y., Hewitt, R.H., Weaver, M.S., Silvernail, J.A., Rajan, K., Hack, M., Brown, J.J., Chu, X. : Thin film encapsulated flexible organic electroluminescent displays. Appl. Phys. Lett. 83, 413 (2003) https://doi.org/10.1063/1.1594284
- Greener, J., Ng, K., Vaeth, K., Smith, T. : Moisture permeability through multilayered barrier films as applied to flexible OLED display. J. Appl. Polym. Sci. 106, 3534 (2007) https://doi.org/10.1002/app.26863
- Xu, H., Luo, D., Li, M., Xu, M., Zou, J., Tao, H., Lan, L., Wang, L., Peng, J., Cao, Y. : A flexible AMOLED display on the PEN substrate driven by oxide thin-film transistors using anodized aluminium oxide as dielectric. J. Mater. Chem. C 2, 1255 (2014) https://doi.org/10.1039/C3TC31710B
- Park, J.-S., Kim, T.-W., Stryakhilev, D., Lee, J.-S., An, S.-G., Pyo, Y.-S., Lee, D.-B., Mo, Y.G., Jin, D.-U., Chung, H.K. : Flexible full color organic light-emitting diode display on polyimide plastic substrate driven by amorphous indium gallium zinc oxide thin-film transistors. Appl. Phys. Lett. 95, 013503 (2009) https://doi.org/10.1063/1.3159832
-
Yabuta, H., Sano, M., Abe, K., Aiba, T., Den, T., Kumomi, H., Nomura, K., Kamiya, T., Hosono, H. : High-mobility thin-film transistor with amorphous
$InGaZnO_4$ channel fabricated by room temperature rf-magnetron sputtering. Appl. Phys. Lett. 89, 112123 (2006) https://doi.org/10.1063/1.2353811 - Jeong, J.K., Jeong, J.H., Choi, J.H., Im, J.S., Kim, S.H., Yang, H.W., Kang, K.N., Kim, K.S., Ahn, T.K., Chung, H.J. : 12.1-Inch WXGA AMOLED Display Driven by Indium-Gallium-Zinc Oxide TFTs Array. SID Symp. Dig. Tech. Pap. 39, 5 (2008)
- Munzenrieder, N., Cherenack, K.H., Troster, G. : The Effects of Mechanical Bending and Illumination on the Performance of Flexible IGZO TFTs. IEEE Trans. Electron Devices 58, 2041 (2011) https://doi.org/10.1109/TED.2011.2143416
- Jeong, H.-J., Han, K.-L., Ok, K.-C., Lee, H.-M., Oh, S., Park, J.-S. : Effect of mechanical stress on the stability of flexible InGaZnO thin-film transistors. J. Inf. Disp. 18, 87 (2017) https://doi.org/10.1080/15980316.2017.1294116
- Park, S.-H.K., Cho, D.-H., Hwang, C.-S., Yang, S., Ryu, M.K., Byun, C.-W., Yoon, S.M., Cheong, W.-S., Cho, K.I., Jeon, J.-H. : Channel protection layer effect on the performance of oxide TFTs. ETRI J. 31, 653 (2009) https://doi.org/10.4218/etrij.09.1209.0043
- Oh, S., Baeck, J.H., Bae, J.U., Park, K.-S., Kang, I.B. : Effect of interfacial excess oxygen on positive-bias temperature stress instability of self-aligned coplanar InGaZnO thin-film transistors. Appl. Phys. Lett. 108, 141604 (2016) https://doi.org/10.1063/1.4945404
- Ide, K., Kikuchi, Y., Nomura, K., Kimura, M., Kamiya, T., Hosono, H. : Effects of excess oxygen on operation characteristics of amorphous In-Ga-Zn-O thin-film transistors. Appl. Phys. Lett. 99, 093507 (2011) https://doi.org/10.1063/1.3633100
- Kim, S., Jeon, Y.W., Kim, Y., Kong, D., Jung, H.K., Bae, M.-K., Lee, J.-H., Ahn, B.D., Park, S.Y., Park, J.-H., Park, J., Kwon, H.-I., Kim, D.M., Kim, D.H. : Impact of oxygen flow rate on the instability under positive bias stresses in DC-sputtered amorphous InGaZnO thin-film transistors. IEEE Electron Device Lett. 33, 62 (2012) https://doi.org/10.1109/LED.2011.2173153
- Barton, J.L., Morain, M. : Hydrogen diffusion in silicate glasses. J. Non-Cryst. Solid 3, 1 (1970) https://doi.org/10.1016/0022-3093(70)90102-X
- Abetz, V., Brinkmann, T., Dijkstra, M., Ebert, K., Fritsch, D., Ohlrogge, K., Paul, D., Peinemann, K.V., Pereira-Nunes, S., Scharnagl, N., Schossig, M. : Developments in membrane research: from material via process design to industrial application. Adv. Eng. Mater. 8, 5 (2006)
- Summary of Properties of Kapton Polyimide Films (Online). http://www.dupont.com/products-and-services/membranes-films/polyi mide-films.html. Accessed 23 Feb 2018
- Oh, S., Woo, J.M., Jang, J.H. : Comparative studies of long-term ambiance and electrical stress stability of IGZO thin-film transistors annealed under hydrogen and nitrogen ambiance. IEEE Trans. Electron Devices 63, 5 (2016) https://doi.org/10.1109/TED.2015.2503659
- Toda, T., Wang, D., Jiang, J., Hung, M.P., Furuta, M. : Quantitative analysis of the effect of hydrogen diffusion from silicon oxide etch-stopper layer into amorphous In-Ga-Zn-O on thin-film transistor. IEEE Trans. Electron Devices 61, 11 (2014)
- Ok, K.-C., Ko Park, S.-H., Hwang, C.-S., Kim, H., Soo Shin, H., Bae, J., Park, J.S. : The effects of buffer layers on the performance and stability of flexible InGaZnO thin film transistors on polyimide substrates. Appl. Phys. Lett. 104, 063508 (2014) https://doi.org/10.1063/1.4864617
- Kamiya, T., Hosono, H. : Roles of hydrogen in amorphous oxide semiconductor. ECS Trans. 54, P103 (2013) https://doi.org/10.1149/05401.0103ecst
- Hanyu, Y., Domen, K., Nomura, K., Hiramatsu, H., Kumomi, H., Hosono, H., Kamiya, T. : Hydrogen passivation of electron trap in amorphous In-Ga-Zn-O thin-film transistors. Appl. Phys. Lett. 103, 202114 (2013) https://doi.org/10.1063/1.4832076
- Nomura, K., Kamiya, T., Hosono, H. : Effects of diffusion of hydrogen and oxygen on electrical properties of amorphous oxide semiconductor, In-Ga-Zn-O. ECS J. Solid State Sci. Technol. 2, P5 (2013) https://doi.org/10.1149/2.011301jss
Cited by
- Effect of Simultaneous Mechanical and Electrical Stress on the Electrical Performance of Flexible In-Ga-Zn-O Thin-Film Transistors vol.12, pp.19, 2018, https://doi.org/10.3390/ma12193248
- Atomic-Layer-Deposited SiOx/SnOx Nanolaminate Structure for Moisture and Hydrogen Gas Diffusion Barriers vol.13, pp.33, 2018, https://doi.org/10.1021/acsami.1c09901
- Effects of polyimide curing on image sticking behaviors of flexible displays vol.11, pp.1, 2021, https://doi.org/10.1038/s41598-021-01364-6