Journal of Ceramic Processing Research

Ceramic Processing Research Center (한양대학교 세라믹연구소)
권호 표지

Thermodynamic analysis on the chemical vapor deposition process of Ta-C-H-Cl system

  • Kim, Hyun-Mi (Engineering Ceramic Center, Korea Institute of Ceramic Engineering Technology) ;
  • Shim, Kwang Bo (Division of Advanced Materials Science and Engineering, Hanyang Univ.) ;
  • Lee, Jung-Min (The 4th R&D Institute, Agency for Defense Development) ;
  • Lee, Hyung-Ik (The 4th R&D Institute, Agency for Defense Development) ;
  • Choi, Kyoon (Engineering Ceramic Center, Korea Institute of Ceramic Engineering Technology)
  • Published : 2018.12.01
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Abstract

Carbon/carbon composites (C/C) have been widely studied in the aerospace field because of their excellent thermal shock resistance and specific strength at high temperature. However, they have the problems that is easily oxidized and deteriorated under atmospheric environment. In order to overcome these shortcomings, the CVD coating of ultra-high-temperature ceramics to C/C has become an important technical issue. In this study, thermodynamic calculations were performed to TaC CVD coating on C/C by FactSage 6.2 program. The Ta-C phase diagrams were constructed with the results of thermodynamic calculations in the Ta-C-H-Cl system. Based on the Ta-C phase diagram, the experimental conditions were designed to confirm the deposition of various phases such as TaC single phase, TaC + C and $TaC+Ta_2C$ by varying the composition of Ta/C ratio. The deposited films were found to be in good agreement with the predicted phases.

Keywords

Acknowledgement

Supported by : Institute of Civil-Military Technology Cooperation

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