Applied Microscopy

Korean Society of Microscopy (한국현미경학회)
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Transmission Electron Microscope Specimen Preparation of Si-Based Anode Materials for Li-Ion Battery by Using Focused Ion Beam and Ultramicrotome

  • Chae, Jeong Eun (Testing & Certification Division Materials Characterization Center, Gumi Electronics & Information Technology Research Institute) ;
  • Yang, Jun Mo (Department of Nanostructure Technology, National Nanofab Center) ;
  • Kim, Sung Soo (Graduate School of Energy Science and Technology, Chungnam National University) ;
  • Park, Ju Cheol (Testing & Certification Division Materials Characterization Center, Gumi Electronics & Information Technology Research Institute)
  • Received : 2018.04.11
  • Accepted : 2018.04.28
  • Published : 2018.06.30
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Abstract

A successful transmission electron microscope (TEM) analysis is closely related to the preparation of the TEM specimen and should be followed by the suitable TEM specimen preparation depending on the purpose of analysis and the subject materials. In the case of the Si-based anode material, lithium atoms of formed Li silicide were removed due to ion beam and electron beam during TEM specimen preparation and TEM observation. To overcome the problem, we proposed a new technique to make a TEM specimen without the ion beam damage. In this study, two types of test specimens from the Si-based anode material of Li-ion battery were prepared by respectively adopting the only focused ion beam (FIB) method and the new FIB-ultramicrotome method. TEM analyses of two samples were conducted to compare the Ga ion damage of the test specimen.

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References

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