Journal of IKEEE (전기전자학회논문지)

Institute of Korean Electrical and Electronics Engineers (한국전기전자학회)
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Design Optimization for High Efficiency Distributed Bragg Reflectors through Simulation Methodology

시뮬레이션을 이용한 고효율 분산 브래그 반사경 최적화 설계 및 특성

  • Kim, Kwan-Do (Dept. of Convergence Software, Pyeongtaek University)
  • Received : 2018.03.04
  • Accepted : 2018.03.19
  • Published : 2018.03.31
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Abstract

This study focused on the development of simulation methodology and design optimization for the DBR(Distributed Bragg Reflectors) structures, which are commonly used in manufacturing optical films and the key components of LED chip and LCD inspection equipments. From the multi-layer simulation, the following results are obtained. First, the wavelength(nm) vs. reflectance(%) can be calculated in the DBR structures that $TiO_2$ and $SiO_2$ thin films are stacked alternately. As a results, it is suggested that highly efficient DBR structures can be designed and manufactured using simulation methodology.

본 연구에서는 LED칩 및 LCD 검사장비의 핵심부품인 광학 필름제조에 많이 사용되고 있는 DBR(Distributed Bragg Reflectors) 구조에 대한 시뮬레이션 방법을 개발하고 이러한 다층박막 특성 시뮬레이션을 통하여 최적의 DBR 구조를 제시하였다. 고굴절률 유전체인 $TiO_2$와 저굴절률 유전체인 $SiO_2$ 박막을 교대로 적층한 다층박막 구조에서 $TiO_2$와 $SiO_2$의 refractive index 값을 사용하여 박막의 배치 및 조합에 따른 wavelength(nm) vs. reflectance(%) 스펙트럼을 계산하였고 이 결과로 시뮬레이션을 통한 고효율 분산 브래그 반사경 최적화 설계 및 공정에 활용하여 DBR 구조 제작에 사용할 수 있었다.

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References

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