마이크로전자및패키징학회지 (Journal of the Microelectronics and Packaging Society)

  • 제25권4호
  • /
  • Pages.35-40
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  • 2018
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  • 1226-9360(pISSN)
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  • 2287-7525(eISSN)
한국마이크로전자및패키징학회 (The Korean Microelectronics and Packaging Society)
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담금 어닐링을 이용한 유·무기 코어-쉘 나노입자 파우더 합성법

Synthesis of Organic-inorganic Core-shell Nanoparticle Powder using Immersion Annealing Process

  • 최영중 (한국세라믹기술원 전자융합소재본부) ;
  • 정현성 (한국세라믹기술원 전자융합소재본부) ;
  • 방지원 (한국세라믹기술원 전자융합소재본부) ;
  • 박운익 (한국세라믹기술원 전자융합소재본부)
  • Choi, Young Joong (Electronic Convergence Materials Division, Korea Institute of Ceramic Engineering & Technology (KICET)) ;
  • Jung, Hyunsung (Electronic Convergence Materials Division, Korea Institute of Ceramic Engineering & Technology (KICET)) ;
  • Bang, Jiwon (Electronic Convergence Materials Division, Korea Institute of Ceramic Engineering & Technology (KICET)) ;
  • Park, Woon Ik (Electronic Convergence Materials Division, Korea Institute of Ceramic Engineering & Technology (KICET))
  • 투고 : 2018.11.16
  • 심사 : 2018.12.13
  • 발행 : 2018.12.31
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⟨ 이전 논문 다음 논문 ⟩

초록

다양한 디바이스 응용분야에 블록공중합체가 사용되기 위해, 블록공중합체의 형상을 제어하기 위한 간단하면서도 실용적인 합성방법이 필요하다. 하지만 콜로이드성의 형판을 사용하는 기존의 방식은 공정이 복합하고 비용이 많이 발생하여, 고순도의 코어-쉘 나노입자를 대량생산하기에 적합하지 않다. 본 논문에서 PS-b-PDMS 블록공중합체를 담금어닐링하여, 20 nm 이하크기를 가지는 PS가 봉입된 코어-쉘 구조의 $SiO_x$나노입자를 합성하였다. 또한, 어닐링 공정에 사용되는 헵테인과 에탄올의 혼합비율이 자기조립된 PS-b-PDMS 블록공중합체 나노입자의 형상에 어떠한 영향을 미치는지 분석하였으며, 최적의 담금어닐링 조건에서 나노입자가 worm-like구조로 변화하는 것을 확인하였다. 이러한 파우더 합성법은 다른 용매기반의 블록공중합체 합성방법에 응용이 가능할 것으로 생각되며, 새로운 가이드라인을 제공할 것으로 예상된다.

Simple and useful synthetic process to control the morphology of block copolymers (BCPs) is required for implementation in various device applications. However, the conventional method to use colloidal templates is not enough to realize the production of pure and massive core-shell nanoparticles due to the cost-intensive complex process. Here, we introduce a novel and facile synthesis method to realize the formation of core-shell $SiO_x$ nanoparticle power by employing an immersion annealing of a sphere-forming poly(styrene-b-dimethylsiloxane) (PS-b-PDMS) BCP. We successfully obtained a PS-encapsulated $SiO_x$ nanoparticle with a diameter of ~20 nm. In addition, we analyzed how the mixing ratio of heptane/ethanol affects the BCP morphology of self-assembled PS-b-PDMS nanoparticles, showing a worm-like structure under the optimum immersion conditions. This useful approach is expected to be extendable to other solvent-based BCP synthesis, providing a new guideline for unique BCP production.

키워드

MOKRBW_2018_v25n4_35_f0001.png 이미지

Fig. 1. Concept for synthesis of core-shell PS-PDMS nanoparticle powder using an immersion annealing system. (a) Schematic diagram of immersion annealing system (top) and vacuum filtration system (bottom) for core-shell nanoparticle powder. (b) Illustration of core-shell structure at different states (thin film and bulk powder) of BCP before RIE process.

MOKRBW_2018_v25n4_35_f0002.png 이미지

Fig. 2. Morphology transition of sphere-forming BCP by using immersion annealing system. (a) Schematic diagram of immersion annealing (IA) system for thin film BCP. (b) Morphology transition from solid sphere (left) to core-shell structure (right) by using IA.

MOKRBW_2018_v25n4_35_f0003.png 이미지

Fig. 3. Morphology transition of BCP nanoparticles by using IA. (a) Solid SiOx nanoparticle of untreated SD51 BCP after RIE process. (b) TEM image of untreated SD51 nanoparticle after RIE process. (c) Core-shell sphere structure of SD51 BCP nanoparticle annealed with ethanol/heptane solvent mixture. (d) TEM image of core-shell nanoparticle structures after RIE process.

MOKRBW_2018_v25n4_35_f0004.png 이미지

Fig. 4. Worm-like core-shell structure of sphere-forming BCP derived from the core-shell nanoparticle structure at high VHep/VEth ratio of 0.25.

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