전기학회논문지 (The Transactions of The Korean Institute of Electrical Engineers)

  • 제67권3호
  • /
  • Pages.474-478
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  • 2018
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  • 1975-8359(pISSN)
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  • 2287-4364(eISSN)
대한전기학회 (The Korean Institute of Electrical Engineers)
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반도체 공정에서 발생하는 혼합분진의 폭발 위험성평가

Risk Assessment of Explosion of Mixed Dust Generated in Semiconductor Manufacturing

  • Park, Chang-Sup (Dept. of Safety Engineering, Seoul National University of Science and Technology) ;
  • Kim, Chan-O (Dept. of Safety Engineering, Seoul National University of Science and Technology)
  • 투고 : 2017.11.28
  • 심사 : 2018.02.07
  • 발행 : 2018.03.01
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초록

The use of metals such as aluminum and titanium and the related industrial facilities have been continuously increasing to meet the requirements of the improvement of high-tech products due to the development of industry, and explosion of metal dust. Semiconductor process Metal dust is essential, but research is insufficient. The purpose of this study is to identify risk by analyzing the quantitative risk such as maximum explosion pressure and minimum explosion concentration applied international test standard in order to select the semiconductor process facilities handling dust and to predict possible risk of accidents.

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참고문헌

  1. Van der, P. and Wel, "Ignition and Propagation of Dust Explosions", Delft Univ. Press, pp. 152-157, 1993.
  2. Seop Woo Han, "Research Trend of Dust Explosion Hazard in Industrial Sites", Korea Occupational Safety & Health Agency, vol. 12, pp. 20-25, August 2008.
  3. Eckhoff, R. K., "Dust explosions in the Process Industries-3rd ed.", Gulf Professional Publishing, pp. 199-250, 2003.
  4. Seung Hyun Kim, Jeong Ah Shin, Hae Dong Park, "Exposure Possibility to By-products during the Processes of Semiconductor Manufacture", Korean Industrial Hygiene Association, vol. 22, no. 1, pp. 52-59, April 2012.
  5. NFPA 652, "Standard on the Fundamentals of Combustible Dust", pp. 6-9, 2016 edition.
  6. NFPA 654 "Standard for the Prevention of Fire and Dust Explosions from the Manufacturing, Processing, and Handling of Combustible Particulate Solids", 2013 edition.
  7. OSHA 3371-08-2009, "Hazard Communication Guidance for Combustible Dusts", 2009.
  8. Woo Jin Jeong, Nagaihirosi, "Explosion Characteristics of Magnesium Dust According to Particle Size", Journal of Korean Society of Hazard Mitigation, vol. 13, no. 2, pp. 203-208, 2013. https://doi.org/10.9798/KOSHAM.2013.13.2.203
  9. Database for Major industrial accidents, Korea Occupational Safety and Health Agency, 1988-2015.
  10. Fire and explosion accident data, JNIOSH 2014.
  11. US. Chemical Safety Board report (CSB) 2014.
  12. Jung Gyun Kuk, Eun Cheol Oh, Yeong Geun Baek, Study on the ignition of the painting booth",Congress of the korean Institute of Fire Investigation, vol. 20, pp. 147-171, April 2010.
  13. KOSHA CODE D-34-1999 "Technical Guidelines for the Prevention of Dust Explosion", Korea Occupational Safety & Health Agency, 1999.
  14. KOSHA CODE D-40-2000 "Dust Collection Equipment Dust Explosion Prevention Technical Guidelines", Korea Occupational Safety & Health Agency, 2000.
  15. KOSHA Guide P-41-2012 "Technical Guidelines on Width Federal Outlet Installation Methods to Prevent Dust Explosion", Korea Occupational Safety and Health Agency, 2012.
  16. KOSHA Guide P-128-2012, Korea Occupational Safety & Health Agency, 2012.
  17. Nakbae Kim, "Characterization of Semiconductor Using Neutron Activation Analysis-II - Manufacturing Process and Surface Depth Profile analysis -", Analytical Science and Technology, vol. 11, no. 6, pp. 1065-1074, 1998
  18. ISO-13320 "Particle Size Analysis-Laser Diffraction Methods, Part 1 : General Principle, 2009