The Transactions of The Korean Institute of Electrical Engineers (전기학회논문지)

The Korean Institute of Electrical Engineers (대한전기학회)
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Risk Assessment of Explosion of Mixed Dust Generated in Semiconductor Manufacturing

반도체 공정에서 발생하는 혼합분진의 폭발 위험성평가

  • Park, Chang-Sup (Dept. of Safety Engineering, Seoul National University of Science and Technology) ;
  • Kim, Chan-O (Dept. of Safety Engineering, Seoul National University of Science and Technology)
  • Received : 2017.11.28
  • Accepted : 2018.02.07
  • Published : 2018.03.01
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Abstract

The use of metals such as aluminum and titanium and the related industrial facilities have been continuously increasing to meet the requirements of the improvement of high-tech products due to the development of industry, and explosion of metal dust. Semiconductor process Metal dust is essential, but research is insufficient. The purpose of this study is to identify risk by analyzing the quantitative risk such as maximum explosion pressure and minimum explosion concentration applied international test standard in order to select the semiconductor process facilities handling dust and to predict possible risk of accidents.

Keywords

References

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