통합자연과학논문집 (Journal of Integrative Natural Science)

조선대학교 기초과학연구원 (The Basic Science Institute Chosun University)
권호 표지
DOI QR코드

DOI QR Code

A Study on Surface Growth Direction and Particle Shape According to the Amount of Oxygen and Deposition Parameters

  • Jeong, Jin (Department of Physics, Chosun University) ;
  • Kim, Seung Hee (Department of Dental Hygiene 73, Gwangju Health University)
  • 투고 : 2018.12.11
  • 심사 : 2018.12.15
  • 발행 : 2018.12.30
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

A zinc oxide thin film doped with aluminum was deposited by RF sputtering. The deposition temperature of the sputter chamber was kept constant at $350^{\circ}C$, the power supplied to the chamber was 75 W, the oxygen flow rate was changed to 10 sccm and 20 sccm, and the thin film deposition time was changed to 120 and 180 minutes. The structures of the deposited zinc oxide thin films were analyzed by van der Waals method using an X-ray diffractometer. As a result of X-ray diffraction, the amount of oxygen supplied to the zinc oxide thin film increased, and the surface growth of the (002), (400), (110), and (103) planes showed a change with increasing deposition time. Moreover, as the amount of oxygen supplied to the zinc oxide thin film increased, their shape was observed to be coarse, and the thin film' s particles shape was correlated with the oxygen chemical defect introduced.

키워드

참고문헌

  1. C. Bauer, G. Boschloo, and E. Mukhtar, Phys. Chem. B 104, p. 5585, 2001.
  2. P. Duran, F. Capel, J. Tartaj and C. Moure, Adv. Mater. Vol. 14, p. 137, 2002. https://doi.org/10.1002/1521-4095(20020116)14:2<137::AID-ADMA137>3.0.CO;2-7
  3. V. Srikant and D. R. Clarke, Journal of Applied Physics, Vol. 81, No. 9, pp. 6357-6364, 1997. https://doi.org/10.1063/1.364393
  4. Z. Li and W. Gao, Materals Letters, Vol. 58, No. 7-8, pp. 1363-1370, 2004. https://doi.org/10.1016/j.matlet.2003.09.028
  5. X. Jiaqiang, C.Yuping, C. Daoyong, and S. Jianian, Sensors and Actuators B, Vol. 113, No. 1, pp. 526-531, 2006. https://doi.org/10.1016/j.snb.2005.03.097
  6. N. Hongsith, C. Viriyaworasakul, P. Mangkorntong, N. Mangkorntong, and S. Choopun, Ceramics International, Vol. 34, No. 4, pp. 823-826, 2008. https://doi.org/10.1016/j.ceramint.2007.09.099
  7. F.-C. Huang, Y.-Y. Chen, and T.-T. Wu, Nanotechnology, Vol. 20, No. 6, Article ID 065501,2009.
  8. K. J. Chen, T. H. Fang, F. Y. Hung et al., Applied Surface Science, Vol. 254, No. 18, pp. 5791-5795, 2008. https://doi.org/10.1016/j.apsusc.2008.03.080
  9. K. J. Chen, F. Y. Hung, Y. T. Chen, S. J. Chang, and Z. S. Hu, Transactions, Vol. 51, No. 7, pp. 1340-1345, 2010.
  10. Y. J. Kim, A. Hadiyawarman, A. Yoon, M. Kim, G. C. Yi, and C. Liu, Nanotechnology, Vol. 22, No. 24, Article ID 245603, 2011.
  11. X. D Wang, J. H. Song, and Z. L. Wang, Journal of Materials Chemistery, Vol. 17, pp. 711-720, 2007. https://doi.org/10.1039/b616963p
  12. S. Zhu, L. Shan, X. Chen et al., RSC Advances, Vol. 3, No. 9, pp. 2910-2916, 2013. https://doi.org/10.1039/c2ra22518b