Journal of the Korean Crystal Growth and Crystal Technology (한국결정성장학회지)

The Korea Association of Crystal Growth (한국결정성장학회)
권호 표지
DOI QR코드

DOI QR Code

Effect of PZN addition on microstructure of PZT thick films by aerosol deposition process

에어로졸 증착법에 의한 PZT 후막의 미세구조에 미치는 PZN 첨가의 영향

  • Jang, Joo-Hee (Department of Materials Science and Engineering, Pukyong National University) ;
  • Park, Yoon-Soo (Department of Materials Science and Engineering, Pukyong National University) ;
  • Park, Dong-Soo (Functional Materials Group, Korea Institute of Machinery and Materials) ;
  • Park, Chan (Department of Materials Science and Engineering, Pukyong National University)
  • 장주희 (부경대학교 재료공학과) ;
  • 박윤수 (부경대학교 재료공학과) ;
  • 박동수 (재료연구소 기능성재료그룹) ;
  • 박찬 (부경대학교 재료공학과)
  • Received : 2017.12.11
  • Accepted : 2018.01.06
  • Published : 2018.02.28
Download PDF
⟨ Previous Next ⟩

Abstract

Lead zinc niobate (PZN) added lead zirconate titanate (PZT) thick films with thickness of $5{\sim}10{\mu}m$ were fabricated on silicon and sapphire substrates using aerosol deposition method. The contents of PZN were varied from 0 %, 20 % and 40 %. The initial particles (PZT, 2PZN-8PZT, 4PZN-6PZT) had irregular shape and submicron sizes. The as-deposited film had fairly dense microstructure without any crack, and showed only a perovskite single phase formed with nano-sized grains. The as-deposited films on silicon were annealed at the temperatures of $700^{\circ}C$, and the films deposited on sapphire were annealed at $900^{\circ}C$ in the electrical furnace. The effects of PZN addition on the microstructural evolution were observed using by FE-SEM and HR-TEM.

에어로졸 증착법에 의해서 상온에서 $6{\mu}m/min$의 속도로 $5{\sim}10{\mu}m$ 두께의 PZT-PZN(0 %, 20 %, 40 %) 복합체의 막을 실리콘/사파이어 기판위에서 제조하였다. 에어로졸 증착에 사용된 PZT, 2PZN-8PZT, 4PZN-6PZT 초기분말입자는 불규칙한 형상을 가지고 있으며 submicron 크기임을 확인하였다. 증착된 막은 어떠한 뜯김이나 기공도 없는 치밀한 막임을 확인하였고 나노크기의 입자를 가진 페로브스카이트 단상이었다. 실리콘기판 및 사파이어 기판위에서 증착된 막은 전기로에서 $700^{\circ}C$ 및 $900^{\circ}C$에서 각각 어닐링처리 하였으며 PZT에 40 %의 PZN이 첨가된 조성의 막의 경우 pyrochlore의 2차상이 형성되었다. 미세구조에 미치는 PZN 첨가의 영향을 관찰하기 위해 FE-SEM 및 HR-TEM이 사용되었다.

Keywords

References

  1. G.H. Haertling, "Ferroeletric ceramics: Histrory and technology", J. Am. Ceram. Soc. 84 (1999) 797.
  2. S.B. Seo, "Low temperature sintering and piezoelectric properties of PZN-PZT ceramics", Dept. of Material Science and Engineering, Master's Thesis, Seoul National University (2002) p. 1.
  3. B.H. Kwon, "Dielectric, pyroelectric and electrostrictive properties of PZN-BT-PT system", Dept. of material Science and Engineering, Master's Thesis, Seoul National University (1996) p. 1.
  4. N. Wakiya, N. Ishizawa, K. Shinozaki and N. Mizutani, "Thermal stability of $Pb(Zn_{13}Nb_{23})O_3 $ (PZN) and consideration of stabilization conditions of perovskite type compounds", Mater. Res. Bull. 30 (1995) 1121.
  5. H. Fan and H.E. Kim, "Perovskite stabilization and electromechanical properties of polycrystalline lead zinc niobate-lead zirconate titanate", J. Appl. Phys. 91 (2002) 317.
  6. S.E. Park and T.R. Shrout, "Ultrahigh strain and piezoelectric behavior in relaxor based ferroelectric single crystals", J. Appl. Phys. 82 (1997) 1804.
  7. J. Akedo, M. Lebedev, A. Iwata, H. Ogiso and S. Nakano, "aerosol deposition method for nano-crystal ceramics coating without firing", Mater. Res. Soc. Symp. Proc. 778 (2003) 289.
  8. J. Akedo and M. Lebedev, "Aerosol deposition method (ADM): A novel method of PZT thick films producing for microactuators", Recent Res. Dev. Mater. Sci. 2 (2001) 51.
  9. J. Akedo and M. Kiyohara, ''Nanostructuring and shock compaction using fine particle beam. Aeorsol deposition for forming of nanocrystal layer and powder techology", J. Soc. Powder Tech. Jpn. 40 (2003) 192.
  10. J. Akedo, "Aerosol deposition method for fabrication of nano crystal ceramic layer", Mater. Sci. Forum 449-452 (2004) 43.
  11. J. Akedo and M. Lebedev, "Microstructure and electrical properties of lead zirconate titanate $(Pb(Zr_{52}/Ti_{48})O_3)$ thick film deposited with aerosol deposition method", Jpn. J. Appl. Phys. 38 (1999) 5397.
  12. L.B. Kong, J. Ma, W. Zhu and O.K. Tan, "Highly enhanced sinterability of commercial PZT powders by high-energy ball milling", Mater. Lett. 46 (2000) 274.