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The Korean Vacuum Society (한국진공학회)
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Dusty Plasmas-from space to semiconductor & display industries

더스티 플라즈마 연구 동향

  • 채길병 (한국원자력연구원 원자력데이터센터)
  • Published : 2017.06.30
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Abstract

Dusty plasmas consisting of electrons, ions, neutral gas molecules, and small solid-state 'dust' particles are ubiquitous. Examples include plasma processing, fusion plasmas, polar mesospheric clouds, Saturn's rings, comet tails, and protoplanetary disks. Since Voyager I and II discovered dusty plasmas in our solar system, dusty plasmas have been extensively studied from space & basic sciences to semiconductor & display industries. Here, a brief review on dusty plasma research is given and some remarkable results are introduced.

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