Journal of IKEEE (전기전자학회논문지)

Institute of Korean Electrical and Electronics Engineers (한국전기전자학회)
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Failure Analysis and Accelerated Life Test of MoxW1-xSi2 Haters Fabricated by SHS process

SHS 공정으로 제조된 MoxW1-xSi2 발열체의 가속수명시험과 고장분석

  • Lee, Dong-Won (Material Technology Center, Korea Testing Laboratory) ;
  • Lee, Sang-Hun (Material Technology Center, Korea Testing Laboratory) ;
  • Kim, Yong-Nam (Material Technology Center, Korea Testing Laboratory) ;
  • Lee, Heesoo (School of Materials Science and Engineering, Pusan National University) ;
  • Lee, Sung-Chul (Production Development Headquarter, Winner Technology) ;
  • Koo, Sang-Mo (Dept. of Electronic Materials Engineering, Kwangwoon University) ;
  • Oh, Jong-Min (Dept. of Electronic Materials Engineering, Kwangwoon University)
  • Received : 2017.09.18
  • Accepted : 2017.09.25
  • Published : 2017.09.30
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Abstract

$Mo_xW_{1-x}Si_2$ heaters were fabricated by self-propagating high-temperature synthesis (SHS) process and post sintering process. To validate the reliability of the $Mo_xW_{1-x}Si_2$ heaters, the accelerated life test (ALT) was conducted, and then lifetime to $Mo_xW_{1-x}Si_2$ heaters was estimated by using Minitab programs. Also, the failure analysis of $Mo_xW_{1-x}Si_2$ heaters after ALT was performed through electrical and structural properties. As the results, it was confirmed that the dominant failure mode of $Mo_xW_{1-x}Si_2$ heaters is the crack formation in heaters and the delamination of protective $SiO_2$ layers.

고온자전합성과 후열처리 공정으로 $Mo_xW_{1-x}Si_2$ 발열체를 제조하였다. $Mo_xW_{1-x}Si_2$ 발열체의 신뢰성을 검증하기 위해 가속수명시험을 수행하였으며, 수명시간을 Minitab 프로그램으로 추정하였다. 또한, 가속수명시험 후의 $Mo_xW_{1-x}Si_2$ 발열체의 고장분석을 전기적과 구조적 특성으로부터 수행하였다. 그 결과, $Mo_xW_{1-x}Si_2$ 발열체의 지배적인 고장 유형은 발열체 내부의 크랙 형성과 $SiO_2$ 보호층의 박리임을 확인하였다.

Keywords

References

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