한국분말재료학회지 (Journal of Powder Materials)

  • 제24권4호
  • /
  • Pages.285-291
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  • 2017
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  • 2799-8525(pISSN)
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  • 2799-8681(eISSN)
한국분말재료학회 (*구 분말야금학회) (The Korean Powder Metallurgy & Materials Institute)
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Development of Dark Field image Processing Technique for the Investigation of Nanostructures

  • Jeon, Jongchul (Manufacturing Technology Office, Korea Institute for Rare Metal, Korea Institute of Industrial Technology) ;
  • Kim, Kyou-Hyun (Manufacturing Technology Office, Korea Institute for Rare Metal, Korea Institute of Industrial Technology)
  • 투고 : 2017.08.12
  • 심사 : 2017.08.21
  • 발행 : 2017.08.28
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초록

We propose a custom analysis technique for the dark field (DF) image based on transmission electron microscopy (TEM). The custom analysis technique is developed based on the $DigitalMicrograph^{(R)}$ (DM) script language embedded in the Gatan digital microscopy software, which is used as the operational software for most TEM instruments. The developed software automatically scans an electron beam across a TEM sample and records a series of electron diffraction patterns. The recorded electron diffraction patterns provide DF and ADF images based on digital image processing. An experimental electron diffraction pattern is recorded from a IrMn polycrystal consisting of fine nanograins in order to test the proposed software. We demonstrate that the developed image processing technique well resolves nanograins of ~ 5 nm in diameter.

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참고문헌

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