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- Titanium Aluminium Nitride 후막의 전자-빔 조사 효과 vol.53, pp.6, 2017, https://doi.org/10.5695/jkise.2020.53.6.280
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Intense electron beam was irradiated on the CrAlN thin films deposited in SKD61 under different incident energies and then the effect of electron beam irradiation on the enhancement of surface hardness and wear resistance was investigated. Surface hardness and wear resistance of the CrAlN films is increased proportionally with the electron beam energy. While the surface hardness of as deposited CrAlN film is Hv (