열처리공학회지 (Journal of the Korean Society for Heat Treatment)

  • 제30권4호
  • /
  • Pages.151-155
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  • 2017
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  • 1225-1070(pISSN)
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  • 2508-4046(eISSN)
한국열처리공학회 (The Korean Society for Heat Treatment)
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급속열처리에 따른 ZTO/Ag/ZTO 박막의 전기적, 광학적 특성 개선 효과

Effect of Post-deposition Rapid Thermal Annealing on the Electrical and Optical Properties of ZTO/Ag/ZTO Tri-layer Thin Films

  • 송영환 (울산대학교 첨단소재공학부) ;
  • 엄태영 (울산대학교 첨단소재공학부) ;
  • 허성보 (한국생산기술연구원 동남지역본부 기능성부품소재그룹) ;
  • 김대일 (울산대학교 첨단소재공학부)
  • Song, Young-Hwan (School of Materials Science and Engineering, University of Ulsan) ;
  • Eom, Tae-Young (School of Materials Science and Engineering, University of Ulsan) ;
  • Heo, Sung-Bo (Functional Components & Materials Group, KITECH) ;
  • Kim, Daeil (School of Materials Science and Engineering, University of Ulsan)
  • 투고 : 2017.05.08
  • 심사 : 2017.05.22
  • 발행 : 2017.07.30
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초록

The ZTO single layer and ZTO/Ag/ZTO tri-layer films were deposited on glass substrates by using the radio frequency (RF) and direct current (DC) magnetron sputtering and then rapid thermal annealed (RTA) in a low pressure condition for 10 minutes at 150 and $300^{\circ}C$, respectively. As deposited tri-layer films show the 81.7% of visible transmittance and $4.88{\times}10^{-5}{\Omega}cm$ of electrical resistivity, while the films annealed at $300^{\circ}C$ show the increased visible transmittance of 82.8%. The electrical resistivity also decreased as low as $3.64{\times}10^{-5}{\Omega}cm$. From the observed results, it is concluded that rapid thermal annealing (RTA) is an attractive post-deposition process to optimize the opto-elecrtical properties of ZTO/Ag/ZTO tri-layer films for the various display applications.

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참고문헌

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