참고문헌
- Byun, J-H., Kim, Y. T., and Lee, M. J. 2013. "Understanding Robust Design with Paper Helicopter Experiment." Journal of the Korean Institute of Industrial Engineers 39(5):374-382. https://doi.org/10.7232/JKIIE.2013.39.5.374
- Cha, K. J., and Chin, C. U. 2000. "The Optimal Design of Low Noise Intake System Using Taguchi Mehod with Non-controllable Factors." J Korean Soc Qual Manag 28(1):41-56.
- Cho, B-J., Kwon, T-Y., Kim, H-M., Venkatesh, P., Park, M-S., and Park, J-G. 2012. "Electrochemical Characterization of Anti-Corrosion Film Coated Metal Conditioner Surfaces for Tungsten." Journal of the Microelectronics and Packaging Society 19(1):61-66. https://doi.org/10.6117/kmeps.2012.19.1.061
- Chung, C. H., 2014. "Mixed Nano Silica Colloidal Slurry for Reliability Improvement of Sapphire Wafer CMP Process." Journal of Applied Reliability 14(1):11-19.
- Guangdong University of Technology. 2017. "Chapter 6: Advanced Manufacturing Technology." Accessed February 13. http://etc.gdut.edu.cn/source/amt/part3/SET2.htm.
- Hong, S. P., Kim, S. M., Park, S., and Jung, E. S. "A Study on Designing of a Menu Structure for the Instrument Cluster IVIS using Taguchi Method." Journal of the Ergonomics Society of Korea 29(1):39-46. https://doi.org/10.5143/JESK.2010.29.1.039
- Jeong, H. D. 2016. "Chemical-Mechanical Balance of CMP." Journal of Mechanical Science and Technology 52(428):36-39.
- Jeong, H. D., and Kim, H. Y. 2001. "Eco-process in a Semiconductor Manufacturing process." Journal of the Korean Society of Precision Engineering 18(9):25-30.
- Jeong, Y., Kim, H., Choi, J. and Jeong, H. 2004. "The Effect of Slurry Flow Rate and Temperature on CMP Characteristic." Journal of the Korean Society of Precision Engineering 21(11):46-52.
- Kim, N-W., and Hur C-W. 2014 "A Study of Data correction method when in-situ end point detection in Chemical-Mechanical Polishing of Copper Overlay." Journal of the Korea Institute of Information and Communication Engineering 18(6):1401-1406. https://doi.org/10.6109/jkiice.2014.18.6.1401
- Kwon, O-H., Koo P-H., and Kwon, H-M. 2016. "Taguchi-based robust design for the footwear outsole." J Korean Soc Qual Manag 44(4):935-949. https://doi.org/10.7469/JKSQM.2016.44.4.935
- Lee, C., and Jeong, H. 2015. "A Study on the Polishing Characteristics Using Floating Nozzle in Linear Roll CMP." Journal of the Korean Society of Precision Engineering 32(7):627-631. https://doi.org/10.7736/KSPE.2015.32.7.627
- Lee, J. C., Hong, J. K., and Yoo, H. D. 2001. "Planarization & Polishing of single crystal Si layer by Chemical Mechanical Polishing." Journal of the Korean Vacuum Society 10(3):361-367.
- Ree, S. 2013. "Study on the Result Changes with the Size of the Variance in Taguchi Method and Factor Experimental." J Korean Soc Qual Manag 41(1):119-134. https://doi.org/10.7469/JKSQM.2013.41.1.119
- Seok, J., Oh, S., and Seok, J. 2007. "An Analysis on the Material Removal Mechanism of Chemical-Mechanical Polishing Process Part I: Coupled Integrated Material Removal Modeling." Journal of the Semiconductor & Display Equipment Technology 6(2):35-40.
- Yang, I-M., Oh, G., Yoo, C-B., and Hwang, I. 2015. Design and Analysis of Experiments. Seoul: Minyoungsa.
- Yun, W. Y., and Seo, S-K. 2013. "Determining the Level of A Noise Factor in Parameter Design for Smaller-the-better Characteristics." Journal of the Korean Institute of Industrial Engineers 39(5):367-373. https://doi.org/10.7232/JKIIE.2013.39.5.367