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High-Speed Monitoring Device to Inspect Inkjet Droplets with a Rotating Mirror and Its Measuring Method for Display Applications

잉크젯을 이용한 디스플레이 생산을 위한 회전 미러 방식의 잉크젯 액적 모니터링 장비 및 측정법 연구

  • Shin, Dong-Youn (Dept. of Graphic Arts Information Engineering, Pukyong Nat'l Univ.)
  • 신동윤 (부경대학교 인쇄정보공학과)
  • Received : 2016.09.03
  • Accepted : 2017.02.03
  • Published : 2017.06.01

Abstract

The development of an inkjet-based manufacturing machine for the production of next-generation displays using organic and quantum-dot light emitting diodes at a low cost has been conducted. To employ inkjet printing in production lines of displays, the development of a high-speed inkjet-monitoring device to verify the reliable droplet jetting status from multiple nozzles is required. In this study, an inkjet monitoring device using a rotatable mirror with rotary and linear ultrasonic motors is developed in place of a conventional, linear reciprocating, motion-based inkjet monitoring device. Its performance is also demonstrated. The measurements of circular patterns with diameters of $10{\mu}m$, $30{\mu}m$, and $50{\mu}m$ are performed with the accuracies of $0.5{\pm}1.0{\mu}m$, $-1.2{\pm}0.3{\mu}m$, and $0.2{\pm}0.5{\mu}m$, respectively, within 17 sec. By optimizing the control program, the takt time can be reduced to as short as 8.6 sec.

차세대 주력 디스플레이인 유기 및 양자점 발광 다이오드를 잉크젯을 이용하여 저렴한 비용으로 생산하기 위한 연구개발이 진행되어 왔으며, 잉크 액적의 토출 신뢰성을 고속으로 검사하기 위한 모니터링 장비의 개발이 요구된다. 본 연구에서는 기존 직선 운동 방식의 잉크젯 모니터링 장비 대신에 로터리 및 리니어 초음파 모터를 이용하여 미러를 회전시킴으로써 노즐들에서 토출되는 잉크 액적들을 모니터링할 수 있는 장비를 개발하여 측정 능력을 시험하였다. $10{\mu}m$, $30{\mu}m$$50{\mu}m$ 직경 원형의 측정 오차는 각각 $0.5{\pm}1.0{\mu}m$, $-1.2{\pm}0.3{\mu}m$$0.2{\pm}0.5{\mu}m$였다. 모니터링 시간은 17초가 소요되었으며, 제어 프로그램의 최적화를 통해 8.6초까지 모니터링 시간을 단축할 수 있는 가능성을 확인하였다.

Keywords

References

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