한국생산제조학회지 (Journal of the Korean Society of Manufacturing Technology Engineers)

  • 제26권2호
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  • Pages.166-171
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  • 2017
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  • 2508-5093(pISSN)
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  • 2508-5107(eISSN)
한국생산제조학회 (The Korean Society of Manufacturing Technology Engineers)
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다양한 양극산화 공정조건에 따른 롤 금형 표면에 형성되는 나노포어 형상에 대한 연구

Investigation of Nanopore Shape Formed on an Aluminum Roll Mold with Various Anodizing Conditions

  • Ryu, In Gon (Department of Advanced Mechanical Engineering (Mechatronics Engineering), Kangwon National University) ;
  • Han, Eui Don (Department of Advanced Mechanical Engineering (Mechatronics Engineering), Kangwon National University) ;
  • Kim, Byeong Hee (Department of Advanced Mechanical Engineering (Mechatronics Engineering), Kangwon National University) ;
  • Seo, Young Ho (Department of Advanced Mechanical Engineering (Mechatronics Engineering), Kangwon National University)
  • 투고 : 2016.09.19
  • 심사 : 2017.02.09
  • 발행 : 2017.04.15
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초록

This study analyzes the effect of anodizing conditions on nanopore formation on a cylindrical aluminum roll. In general, a nanopore is formed at the center of a concave base-pattern. Occasionally, multiple nanopores are formed on a single base-pattern. However, to control the diameter and interpore distance precisely, single nanopores are required. In this study, the ratio of the number of single nanopores to the total number of nanopores was investigated by varying anodizing conditions such as electrode area, electrolyte concentration, and rotation speed of the roll mold. The areal ratio of the counter-electrode to the working electrode (aluminum), electrolyte concentration, and the roll-mold rotation speed were varied from 0.4% to 42%, 0.07 M to 0.3 M, and 5 rpm to 75 rpm, respectively. The experimental results showed that the single-nanopore ratio increased with increasing counter-electrode area and electrolyte concentration. However, the rotation speed had no significant effect on nanopore shape.

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참고문헌

  1. Wu, G. M., Yen, C. C., Chien, H. W., Lu, H. C., Chang, T. W., Nee, T. E., 2011, Effects of Nano-structured Photonic Crystals on Light Extraction Enhancement of Nitride Light-emitting Diodes, Thin Solid Films, 519 5074-5077. https://doi.org/10.1016/j.tsf.2011.01.131
  2. Kim, S. H., Lee, K. D., Kim, J. Y., Kwon, M. K., Park, S. J., 2007, Fabrication of Photonic Crystal Structures on Light Emitting Diodes by Nanoimprint Lithography, Nanotechnology, 18 055306 (5pp). https://doi.org/10.1088/0957-4484/18/5/055306
  3. Jiao, F., Huang, Q., Ren, W., Zhou, W., Qi, F., Zheng, Y., Xie, J., 2013, Enhanced Performance for Solar Cells with Moth-eye Structure Fabricated by UV Nanoimprint Lithography, Microelectronic Engineering, 103 126-130. https://doi.org/10.1016/j.mee.2012.10.012
  4. Deniz, H., Khudiyev, T., Buyukserin, F., Bayindir, M., 2011, Room Temperature Large-area Nanoimprinting for Broadband Biomimetic Antireflection Surfaces, Appl. Phys. Lett., 99 183107. https://doi.org/10.1063/1.3657766
  5. Stavenga, D. G., Foletti, S., Palasantzas, G., Arikawa, K., 2006, Light on the Moth-eye Corneal Nipple Array of Butterflies, Proc. R. Soc. B, 273 661-667. https://doi.org/10.1098/rspb.2005.3369
  6. Shin, H. G., Park, Y. M., Seo, Y. H., Kim, B. H., 2009, Fabrication of Nano Master with Anti-reflective Surface Using Aluminum Anodizing Process, Journal of the Korean Society of Machine Tool Engineers, 18:6 697-701.
  7. Park, Y. M., Seo, S. H., Seo, Y. H., Kim, B. H., 2015, Fabrication of Nanopatterned PDMS Elastic Stamp Mold Using Surface Treatment of Nanotemplate, Journal of the Korean Vacuum Society, 24:1 038-042.
  8. Gim, T. J., Lee, B. J., Shina, P. K., 2010, Anti-reflection Coating Application of Si x O y-Si x N y Stacked-Layer Fabricated by Reactive Sputtering, Journal of the Korean Vacuum Society, 19:5 341-346. https://doi.org/10.5757/JKVS.2010.19.5.341
  9. Koo, H. Y., Yi, D. K., Yoo, S. J., Kim, D. Y., 2004, A Snowman-like Array of Colloidal Dimers for Antireflecting Surfaces, Adv. Mater., 16:3 274-277. https://doi.org/10.1002/adma.200305617
  10. Shin, H. G., Kwon, J. T., Seo, Y. H., Kim, B. H., 2008, Development of 3d Micro-nano Hybrid Patterns using Anodized Aluminum and Micro-indentation, Thin Solid Films, 516 6438-6443. https://doi.org/10.1016/j.tsf.2008.02.053
  11. Han, J., Choi, S., Lim, J., Lee, B. S., Kang, S., 2009, Fabrication of Transparent Conductive Tracks and Patterns on Flexible Substrate using a Continuous UV Roll Imprint Lithography, J. Phys. D: Appl. Phys., 42:11 115503. https://doi.org/10.1088/0022-3727/42/11/115503