References
- R. C. Jaeger, Suhling, J. C. Suhling, R. Ramani, "Errors Associated with the Design, Calibration of Piezoresistive Stress Sensors in (100) Silicon," IEEE Transactions on Components, Packaging, and Manufacturing Technology - Part B: Advanced Packaging, Vol. 17(1), pp. 97-107, 1994. https://doi.org/10.1109/96.296437
- E. Lund and T. Finstad, "Measurement of the Temperature Dependency of the Piezoresistance Coefficients in p-type Silicon," Advances in Electronic Packaging, Vol. 1 ASME 1999, pp. 215-218, 1999.
- J. C. Suhling and R. C. Jaeger, "Silicon piezoresistive stress sensors and their application in electronic packaging", IEEE Sensors Journal, Vol. 1, no. 1, pp. 14-30, 2001. https://doi.org/10.1109/JSEN.2001.923584
-
J. Richter and O. Hansen, "Piezoresistance of silicon and strained
$Si_{0.9}Ge_{0.1}$ ", Sensors and Actuators A, Vol. 123-124, pp. 388-396, 2005. https://doi.org/10.1016/j.sna.2005.02.038 - A. Mian, J. C. Suhling and R. C. Jaeger, "The van der Pauw stress sensors," IEEE Sensors Journal, Vol. 6, no. 2, pp. 340-356, 2006. https://doi.org/10.1109/JSEN.2006.870140
- C.-H Cho and H.-Y Cha, "Stress-Sensors with High-Sensitivity Using the Combined Meandering-Patterns," JSTS, Vol. 15(1), pp. 1-6, 2015. https://doi.org/10.5573/JSTS.2015.15.1.001
-
C.-H Cho, R. C. Jaeger and J. C. Suhling, "Characterization of the Temperature Dependence of the Piezoresistive Coefficients of Silicon From -
$150^{\circ}C$ to$+125^{\circ}C$ ," IEEE Sensors Journal, Vol.8(8), 1455-, 2008. https://doi.org/10.1109/JSEN.2008.923575 - C. S. Smith, "Piezoresistance Effects in Germanium and Silicon," Physical Review, Vol. 94 (1), 42-49, 1954. https://doi.org/10.1103/PhysRev.94.42
- C.-H Cho and H.-Y Cha, "Error Analysis in Stress Measurement induced by Strain Effects on (111) Silicon," JKPS, Vol. 62(9), pp. 1307-1311, 2013. https://doi.org/10.3938/jkps.62.1307