DOI QR코드

DOI QR Code

A study on thermo-mechanical behavior of MCD through bulge test analysis

  • Altabey, Wael A. (International Institute for Urban Systems Engineering, Southeast University)
  • 투고 : 2016.08.28
  • 심사 : 2017.01.19
  • 발행 : 2017.04.25

초록

The Micro circular diaphragm (MCD) is the mechanical actuator part used in the micro electro-mechanical sensors (MEMS) that combine electrical and mechanical components. These actuators are working under harsh mechanical and thermal conditions, so it is very important to study the mechanical and thermal behaviors of these actuators, in order to do with its function successfully. The objective of this paper is to determine the thermo-mechanical behavior of MCD by developing the traditional bulge test technique to achieve the aims of this work. The specimen is first pre-stressed to ensure that is no initial deflection before applied the loads on diaphragm and then clamped between two plates, a differential pressure (P) and temperature ($T_b$) is leading to a deformation of the MCD. Analytical formulation of developed bulge test technique for MCD thermo-mechanical characterization was established with taking in-to account effect of the residual strength from pre-stressed loading. These makes the plane-strain bulge test ideal for studying the mechanical and thermal behavior of diaphragm in both the elastic and plastic regimes. The differential specimen thickness due to bulge effect to describe the mechanical behavior, and the temperature effect on the MCD material properties to study the thermal behavior under deformation were discussed. A finite element model (FEM) can be extended to apply for investigating the reliability of the proposed bulge test of MCD and compare between the FEM results and another one from analytical calculus. The results show that, the good convergence between the finite element model and analytical model.

키워드

참고문헌

  1. Ahmed, M. and Hashmi, M.S.J. (1998), "Finite-element analysis of bulge forming applying pressure and inplane compressive load", Mater. Process. Technol., 77(1), 95-102. https://doi.org/10.1016/S0924-0136(97)00404-4
  2. Brandon, J.F., Lecoanet, H. and Oytana, C. (1979), "A new formulation for the bulging of viscous sheet metals", J. Mech. Sci., 21(7), 379-386. https://doi.org/10.1016/0020-7403(79)90058-4
  3. Chater, E. and Neale, K.W. (1983), "Finite plastic deformation of a circular membrane under hydrostatic pressure-I", Mech. Sci., 25(4), 219-233. https://doi.org/10.1016/0020-7403(83)90026-7
  4. Grolleau, V., Gary, G. and Mohr, D. (2008), "Biaxial testing of sheet materials at high strain rates using viscoelastic bars", Exp. Mech., 48(3), 293-306. https://doi.org/10.1007/s11340-007-9073-5
  5. Hill, R. (1950), "A theory of plastic bulging of a metal diaphragm by lateral pressure", Dub. Philos. Mag. J. Sci., 41(322), 1133-1142. https://doi.org/10.1080/14786445008561154
  6. Hill, R. (1990), "Constitutive modeling of orthotropic plasticity IN sheet metals", Mech. Phys. Sol., 38(3), 405-417. https://doi.org/10.1016/0022-5096(90)90006-P
  7. Huang, A., Lu, C., Wu, S., Chen, T., Vinci, R.P., Brown, W.L. and Lin, M. (2016), "Viscoelastic mechanical properties measurement of thin Al and Al-Mg films using bulge testing", Thin Sol. Films, 618, 2-7. https://doi.org/10.1016/j.tsf.2016.03.064
  8. Ilahi, M.F. and Paul, T.K. (1985), "Hydrostatic bulging of a circular soft brass diaphragm", J. Mech. Sci., 27(5), 275-280. https://doi.org/10.1016/0020-7403(85)90017-7
  9. Ilahi, M.F. (1981), "Hydrostatic bulging of a circular aluminum diaphragm", Mech. Sci., 23(4), 221-227.
  10. Itozaki, H. (1982), "Mechanical properties of composition modulated copper-palladium foils", Ph.D. Dissertation, Northwestern University, U.S.A.
  11. Jung, B., Lee, H., Hwang, K. and Park, H. (2012), "Measurement of mechanical properties of thin films using a combination of the bulge test and nanoindentation", Trans. Kor. Soc. Mech. Eng. B, 36(2), 117-123. https://doi.org/10.3795/KSME-B.2012.36.2.117
  12. Jung, B., Lee, H., Hwang, K. and Park, H. (2013), "Observation of size effect and measurement of mechanical properties of Ti thin film by bulge test", Trans. Kor. Soc. Mech. Eng. B, 37(1), 19-25. https://doi.org/10.3795/KSME-B.2013.37.1.019
  13. Kular, G.S. and The, J.H.L. (1972), "The bulging of anisotropic aluminum sheets-a comparison of theory and experiments", J. Mach. Tool Des. Res., 12(4), 281-296. https://doi.org/10.1016/0020-7357(72)90015-7
  14. Mellor, P.B. (1956), "Stretch forming under fluid pressure", Mech. Phys. Sol., 5(1), 41-56. https://doi.org/10.1016/0022-5096(56)90006-0
  15. Small, M.K. and Nix, W.D. (1992), "Analysis of the accuracy of the bulge test in determining the mechanical properties of thin-films", Mater. Res., 7(6), 1553-1563. https://doi.org/10.1557/JMR.1992.1553
  16. Storakers, B. (1966), "Finite plastic deformation of a circular membrane under hydrostatic pressure", Mech. Sci., 8(10), 619-628. https://doi.org/10.1016/0020-7403(66)90040-3
  17. Suttner, S. and Merklein, M. (2016), "Experimental and numerical investigation of a strain rate controlled hydraulic bulge test of sheet metal", Mater. Process. Technol., 235, 121-133. https://doi.org/10.1016/j.jmatprotec.2016.04.022
  18. Tang, S.C. (1982), "Large strain analysis of an inflating membrane", Comput. Struct., 15(1), 71-78. https://doi.org/10.1016/0045-7949(82)90034-7
  19. Ventsel, E. and Krauthammer, T. (2001), Thin Plates and Shells: Theory: Analysis, and Applications, Marcel Dekker Inc., New York, U.S.A.
  20. Vlassak, J.J. (1994), "New experimental techniques and analysis methods for the study of mechanical properties of materials in small volumes", Ph.D. Dissertation, Stanford University, California, U.S.A.
  21. Wan, K., Guo, S. and Dillard, D.A. (2003), "A theoretical and numerical study of a thin clamped circular film under an external load in the presence of a tensile residual stress", Thin Sol. Films, 425(1), 150-162. https://doi.org/10.1016/S0040-6090(02)01103-3
  22. Wang, N.M. and Shammamy, M.R. (1969), "On the plastic bulging of a circular diaphragm by hydrostatic pressure", J. Mech. Phys. Sol., 17(1), 43-61. https://doi.org/10.1016/0022-5096(69)90012-X
  23. Xiang, Y., Chen, X. and Vlassak, J.J. (2005), "Plane-strain bulge test for thin films", Mater. Res. Soc., 20(9), 2360-2370. https://doi.org/10.1557/jmr.2005.0313
  24. Yang, L., Long, S., Ma, Z. and Wang, Z. (2014), "Accuracy analysis of plane-strain bulge test for determining mechanical properties of thin films", Trans. Nonfer. Metals Soc. China, 24(10), 3265-3273. https://doi.org/10.1016/S1003-6326(14)63466-X
  25. Zeghloul, A. (1991), "Influence of material parameters on the hydrostatic bulging of a circular diaphragm", Mech. Sci., 33(3), 229-243. https://doi.org/10.1016/0020-7403(91)90049-9
  26. Zhang, J., Sun, Y., Li, D., Cao, Y., Wang, Z., Ma, J. and Zhao, G. (2015), "Modeling the mechanics of graphene-based polymer composite film measured by the bulge test", Phys. D: Appl. Phys., 48(42), 425302. https://doi.org/10.1088/0022-3727/48/42/425302

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