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다이아몬드전착 밴드쏘우장비를 이용한 고치밀도 알루미나소결체의 다이싱가공 성능평가

Performance Evaluation of Dicing Sawing of High-densified Al2O3 Bulk using Diamond Electroplated Band-saw Machine

  • Lee, Yong-Moon (Graduate school of convergence science, Pusan National University) ;
  • Park, Young-Chan (Graduate school of convergence science, Pusan National University) ;
  • Kim, Dong-Hyun (Business Support Division, Korea institute of ceramic engineering & technology) ;
  • Lee, Man-Young (MTI Diamond, Ltd) ;
  • Kang, Myung Chang (Graduate school of convergence science, Pusan National University)
  • 투고 : 2017.11.21
  • 심사 : 2017.12.05
  • 발행 : 2017.12.31

초록

Recently, the brittle materials such as ceramics, glass, sapphire and textile material have been widely used in semiconductors, aerospace and automobile owing to high functional characteristics. On the other hand, it has the characteristics of difficult-to-cut material relative to all materials. In this study, diamond electro-deposited band-saw machine was developed to operate stably using water-coolant type through relative motion between band-saw tool and $Al_2O_3$ material. High densified $Al_2O_3$ material was manufactured by spark plasma sintering method. The bulk density was observed by the Archimedes law and the theoretical density was estimated to be $3.88g/cm^3$ and its hardness 14.7 MPa. From the dicing sawing test of $Al_2O_3$ specimen, behavior of surface roughness and band-saw wear are dominantly affected by the increase of the band-saw linear velocity. Additionally, an continuous pattern type of diamond band-saw was a very effective due to entry impact as a one-off for brittle material.

키워드

참고문헌

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피인용 문헌

  1. 고강도 경량화 산업용 풀리 개발을 위한 이종접합 사출풀리 제작에 관한 연구 vol.18, pp.6, 2017, https://doi.org/10.14775/ksmpe.2019.18.6.076