Journal of IKEEE (전기전자학회논문지)

Institute of Korean Electrical and Electronics Engineers (한국전기전자학회)
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Flexible Durability and Characteristics of ZnO, AZO and ITO Thin Films Grown by Aerosol Deposition Process

에어로졸 증착 공정으로 제조된 ZnO, AZO, ITO 박막의 특성과 유연 내구성

  • Lee, Dong-Won (Material Technology Center, Korea Testing Laboratory) ;
  • Cho, Myung-Yeon (Dept. of Electronic Materials Engineering, Kwangwoon University) ;
  • Lee, Sang-Hun (Material Technology Center, Korea Testing Laboratory) ;
  • Kim, Yong-Nam (Material Technology Center, Korea Testing Laboratory) ;
  • Lee, Daeseok (Dept. of Electronic Materials Engineering, Kwangwoon University) ;
  • Koo, Sang-Mo (Dept. of Electronic Materials Engineering, Kwangwoon University) ;
  • Oh, Jong-Min (Dept. of Electronic Materials Engineering, Kwangwoon University)
  • Received : 2017.10.11
  • Accepted : 2017.12.20
  • Published : 2017.12.31
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Abstract

We investigated the microstructure, electrical and optical characteristics of ZnO, AZO and ITO films using aerosol deposition process. As gas consumption increased, the electrical and optical characteristics of ZnO, AZO and ITO films were improved, and electrical and optical characteristics of ZnO, AZO and ITO films with a thickness of 400 nm were successfully fabricated on PET substrates at room temperature. The mechanical flexibility durability test shows that the ZnO films can withstand 5,000 cycles and AZO and ITO films occurs to crack in films with degradation of resistance and transmittance. Even though the AZO and ITO films shows slightly lower durability than the ZnO films, this is expected to improve performance of films through optimized processing condition and particle size control.

에어로졸 증착 공정을 이용하여 ZnO, AZO 및 ITO 막을 증착하고 코팅막의 미세구조, 광학적 및 전기적 특성을 연구하였다. 상온에서 PET 기판 위에 약 400 nm의 두께를 가지는 ZnO, AZO 및 ITO 막을 성공적으로 제조할 수 있었으며 캐리어 가스 유량이 증가하면서 ZnO, AZO 및 ITO 막의 광학적 특성 및 전기적 특성이 향상되었다. 기계적인 유연 내구성 시험에 있어 ZnO 막은 5,000회의 굽힘에도 파괴가 발생하지 않은 반면 AZO 및 ITO 막은 5000회 굽힘 시험 후 막의 파괴가 발생하고 투과도 및 저항의 성능이 저하되었다. 결론적으로 AZO 및 ITO 막의 성능은 ZnO 막에 비하여 약간 열세이나, 입자크기 제어 및 공정 최적화를 통해 성능을 향상시킬 수 있을 것으로 판단된다.

Keywords

References

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