Applied Microscopy

Korean Society of Microscopy (한국현미경학회)
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Optimal Conditions for Defect Analysis Using Electron Channeling Contrast Imaging

  • Oh, Jin-Su (School of Advanced Materials Science and Engineering, Sungkyunkwan University) ;
  • Yang, Cheol-Woong (School of Advanced Materials Science and Engineering, Sungkyunkwan University)
  • Received : 2016.09.26
  • Accepted : 2016.09.26
  • Published : 2016.09.30
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Abstract

Electron channeling contrast imaging (ECCI) is a powerful analyzing tool for identifying lattice defects like dislocations and twin boundaries. By using diffraction-based scanning electron microscopy technique, it enables microstructure analysis, which is comparable to that obtained by transmission electron microscopy that is mostly used in defect analysis. In this report, the optimal conditions for investigating crystal defects are suggested. We could obtain the best ECCI images when both acceleration voltage and probe current are high (30 kV and 20 nA). Also, shortening the working distance (6 mm) enhances the quality of defect imaging.

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References

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