Korean Chemical Engineering Research

  • 제54권5호
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  • Pages.598-605
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  • 2016
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  • 0304-128X(pISSN)
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  • 2233-9558(eISSN)
한국화학공학회 (The Korean Institute of Chemical Engineers)
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스퍼터링을 이용한 바나듐 합금 박막화에 관한 연구

Characterization of the Vanadium Alloy Thin Films Coated by Sputtering

  • 윤용호 (경기대학교 화학공학과) ;
  • 정지훈 (경기대학교 화학공학과)
  • Yoon, Yongho (Department of Chemical Engineering, Kyonggi University) ;
  • Jung, Jihoon (Department of Chemical Engineering, Kyonggi University)
  • 투고 : 2016.07.03
  • 심사 : 2016.08.02
  • 발행 : 2016.10.01
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초록

V-Cr-Y 합금은 높은 투과도와 선택도를 가진 수소 분리막 재료이다. V-Cr-Y 분리막의 투과속도를 증가시키기 위하여 sputtering을 이용한 V-Cr-Y 박막을 제조하고 그 특성을 연구하였다. V-Cr-Y 성분이 각각 89.8%, 10.0%, 0.2%인 타겟을 이용하여 실리콘웨이퍼 위에 박막을 증착시켰으며, EDS 분석을 통해 박막조성이 타겟조성과 일치함을 확인하였다. 스퍼터링 온도와 출력이 증가할수록 박막의 성장속도와 결정크기가 증가하였으며, 압력이 감소할수록 결정구조가 보다 미세하고 치밀해졌다. 최적 스퍼터링 조건은 교류 고주파(RF), 2mTorr, 300W, 상온이었으며, 이 조건으로 제조한 박막을 열처리 하여 수소분리에 적합한 박막을 얻을 수 있었다.

V-Cr-Y alloy is a material for hydrogen separation membrane possessing high transmittance and selectivity. In order to increase the rate of hydrogen permeation flux through the membrane, V-Cr-Y thin film was prepared using a sputtering technique and was investigated focusing on its basic properties. Thin film was deposited on a silicon wafer using a target including V (89.8%), Cr (10.0%) and Y(0.2%), and results of EDS analysis confirm that the ratio of metal in thin film agrees with that in the target. Higher sputtering temperature and power resulted in more rapid growth rate of the thin film and larger size of the crystals, and denser and finer crystal structure was observed when lower pressure was applied. An optimal sputtering condition was found with RF, 2mTorr, 300W and ambient temperature, and a suitable V-Cr-Y thin film for hydrogen separation was obtained upon heat treatment of the thin film prepared in this way.

키워드

참고문헌

  1. Kanniche, M., Bonnivard, R. G., Jaud, P., Marcos, J. V., Amann, J. M. and Bouallou, C., "Pre-combustion, Post-combustion and Oxycombustion in Thermal Power Plant for $CO_2$ Capture," Appl Therm Eng., 30(1), 53-62(2010). https://doi.org/10.1016/j.applthermaleng.2009.05.005
  2. Carbo, M. C., Boon, J., Jansen, D., van Dijk, H. A. J., Dijkstra, J. W., van den Brinka, R. W. and Verkooijenb, A. H. M., "Steam Demand Reduction of Water-gas Shift Reaction in IGCC Power Plants with Pre-combustion $CO_2$ Capture," Int J Greenhouse Gas Control, 3(6), 712-719(2009). https://doi.org/10.1016/j.ijggc.2009.08.003
  3. NETL, Current and Future Technologies for Gasification-Based Power Generation, DOE/NETL, 2, ES-6(2010).
  4. Kim, D. W., Kim, H. G., Um, Ki. Y., Kim, S. H., Lee, I. S., Park, J. S. and Ryi, S. K., "Characteristic of Pd-Cu-Ni Alloy Hydrogen Membrane using the Cu Reflow," Korean Chem. Eng. Res., 44(2), 160-165(2006).
  5. Burkhanov, G. S., Gorina, N. B., Kolchugina, N. B. and Roshan, N. R., "Palladium-Based Alloy Membranes for Separation of High Purity Hydrogen from Hydrogen-Containing Gas Mixtures," Platinum Metals Rev., 55(1), 3-12(2011). https://doi.org/10.1595/147106711X540346
  6. Jeon, S. I. and Park, J. H., "Hydrogen Permeation Properties of Pd-coated $V_{89.8}Cr_{10}Y_{0.2}$ Alloy Membrane Using WGS Reaction Gases," Hydrogen Energy, 38, 6085-6091(2013). https://doi.org/10.1016/j.ijhydene.2013.01.172
  7. Fort, D., Farr, J. P. G. and Harris, I. R., "A Comparison of Palladiumsilver and Palladium-yttrium Alloys as Hydrogen Separation Membranes," Journal of the Less Common Metals, 39(2), 293-308(1975). https://doi.org/10.1016/0022-5088(75)90204-0
  8. Symons, D. M., "Hydrogen Embrittlement of Ni-Cr-Fe Alloys," Metall Mater Trans A, 28(3), 655-663(1997). https://doi.org/10.1007/s11661-997-0051-4
  9. Swansiger, W. A., Swisher, J. H., Darginis, J. P. and Schoenfelder, C. W., "Hydrogen Permeation in Palladium-chromium Alloys," J Phys Chem., 80(3), 308-312(1976). https://doi.org/10.1021/j100544a021
  10. Lee, S. W., Park, J. S., Lee, C. B., Lee, D. W., Kim, H., Ra, H. W., Kim, S. H. and Ryi, S. K., "$H_2$ Recovery and $CO_2$ Capture After Water-gas Shift Reactor Using Synthesis Gas from Coal Gasification," Energy, 66(C), 635-642(2014). https://doi.org/10.1016/j.energy.2014.01.043
  11. Kong, S. M., Xiao, Y., Kim, E. H. and Chung, C. W., "Characteristics of Mo Thin Films Deposited by DC Magnetron Sputtering," Korean Chem. Eng. Res., 49(2), 195-199(2011). https://doi.org/10.9713/kcer.2011.49.2.195
  12. Lee, D. Y. and Chung, C. W., "Effect of Deposition Parameters on the Properties of TiN Thin Films Deposited by rf Magnetron Sputtering," Korean Chem. Eng. Res., 46(4), 676-680(2008).
  13. Hughes, R., "Composite Palladium Membranes for Catalytic Membrane Reactors," Membr. Technol., 2001(131), 9-13(2001). https://doi.org/10.1016/S0958-2118(01)80152-X