산업진흥연구 (Industry Promotion Research)

  • 제1권2호
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  • Pages.7-11
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  • 2016
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  • 2466-1139(pISSN)
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  • 2714-013X(eISSN)
산업진흥원 (Industrial Promotion Institute)
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SnO2 박막의 열처리온도에 따른 결정성과 전기적인 특성 연구

Study on Electrical Properties and Structures of SnO2 Thin Films Depending on the Annealing Temperature

  • Yeon, Su Ji (Dept. of Semiconductor, Cheongju University) ;
  • Lee, Sung Hee (Dept. of Semiconductor, Cheongju University) ;
  • Oh, Teresa (Dept. of Semiconductor, Cheongju University)
  • 투고 : 2016.06.26
  • 심사 : 2016.07.08
  • 발행 : 2016.07.31
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초록

$SnO_2$ 박막의 결정성과 화학적인 결합구조의 변화가 전기적인 특성에 미치는 영향을 조사하였다. 증착한 $SnO_2$은 결정질 특성을 가지며 열처리온도가 증가함에 따라 비정질 특성으로 변하였으며, 산소공공의 함량변화는 열처리 온도가 증가할수록 증가하였다가 감소하였다. 산소공공이 증가하면 결정성이 증가하다가 산소공공이 감소하기 시작하면 비정질특성이 우세하게 나타났다. 이러한 결정성에서 비정질로 변화하는 특성의 차이는 PL 분석에 의한 광학적 특성에서 뚜렷하게 나타났으며, 100도와 150도 열처리를 한 박막에서 가장 큰 차이가 나는 것을 보여주었다. XRD 분석보다는 $SnO_2$ 결정구조의 변화에 대하여 광학적인 특성변화에서 더 뚜렷하게 나타난 이유는 케리어의 이온화에 의한 광학적 여기량이 150도 열처리에서 크게 증가하였기 때문이며, 더 높은 온도에서는 광학적 여기량이 감소한 이유는 산소공공에 의한 케리어가 많지 않았기 때문으로 확인할 수 있다.

$SnO_2$ films were annealed in a vacuum atmosphere conditions to research the temperature dependency of current-voltage characteristics, crystal structure and chemical properties. The $SnO_2$ film annealed in a vacuum became an amorphous structure, but the degree of amorphous structure changed in accordance with the content of oxygen vacancy, which increased at film annealed at $100^{\circ}C$ and then decreased over the sample at annealed at $150^{\circ}C$. Because the crystallinity was affected the content of oxygen vacancy. The oxygen vacancy as carriers disappeared with increasing the annealing temperatures, and the depletion layer increased. Therefore the content of exiton as optical properties increased with becoming the amorphous structure. So the intensity of PL spectra increased with increasing the annealing temperature.

키워드

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