Abstract
A PFA lined ball valve, which is machined with fluorinated resin PFA to its inner part for improving corrosion resistance, non-stickness, heat-resistance, has been widely used in semiconductor/LCD manufacturing processes with the high purity chemicals as working fluid. Due to the safety concerns, the experiments for measuring the flow coefficient of a PFA lined ball valve should be conducted with water at room temperature according to IEC standards. However, it is required to know the real flow coefficient with the real working fluid, because the flow coefficient is critical to correctly design valves in piping system. In this study, we calculated the flow coefficient of a PFA lined ball valve 40A with hydrochloric acid ($40^{\circ}C$ 36% HCl) as the working fluid using a commercial CFD package, ANSYS CFX v15. The computational results had a good agreement with the measured data and showed a little difference between water and hydrochloric acid as the working fluid of a PFA lined ball valve.