한국표면공학회지 (Journal of the Korean institute of surface engineering)

  • 제49권3호
  • /
  • Pages.265-273
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  • 2016
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  • 1225-8024(pISSN)
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  • 2288-8403(eISSN)
한국표면공학회 (The Korean Institute of Surface Engineering)
권호 표지
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피도금 탄소재의 산처리가 무전해 동도금에 미치는 영향

Effects of Acid Treatment of Carbon on Electroless Copper Plating

  • 신아리 (충남대학교 신소재공학과) ;
  • 한준현 (충남대학교 신소재공학과)
  • Shin, Ari (Department of Materials Science & Engineering, Chungnam National University) ;
  • Han, Jun Hyun (Department of Materials Science & Engineering, Chungnam National University)
  • 투고 : 2016.06.24
  • 심사 : 2016.06.29
  • 발행 : 2016.06.30
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초록

The effects of surface modification by nitric acid on the pre-treatment of electroless copper plating were investigated. Copper was electroless-plated on the nitric acid treated graphite activated by a two-step pre-treatment process (sensitization + activation). The chemical state and relative quantities of the various surface species were determined by X-ray photoelectron spectroscopy (XPS) after nitric acid modification or pre-treatment. The acid treatment increased the surface roughness of the graphite due to deep and fine pores and introduced the oxygen-containing functional groups (-COOH and O-C=O) on the surface of graphite. In the pre-treatment step, the high roughness and many functional groups on the nitric acid treated graphite promoted the adsorption of Sn and Pd ions, leading to the uniform adsorption of catalyst ($Pd^0$) for Cu deposition. In the early stage of electroless plating, a lot of tiny copper particles were formed on the whole surface of acid treated graphite and then homogeneous copper film with low variation in thickness was formed after 30 min.

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