Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Study on the Fabrication and Evaluation of the MEMS Based Curved Beam Air Flowmeter for the Vehicle Applications

MEMS 기반의 차량용 휨형 유속센서의 제작 및 특성 연구

  • Park, Cheol Min (Department of automotive engineering, Seoul National University of Science and Technology) ;
  • Choi, Dae Keun (Graduate school of NID Fusion Technology, Seoul National University of Science and Technology) ;
  • Lee, Sang Hoon (Department of automotive engineering, Seoul National University of Science and Technology)
  • 박철민 (서울과학기술대학교 자동차공학과) ;
  • 최대근 (서울과학기술대학교 NID 융합기술대학원) ;
  • 이상훈 (서울과학기술대학교 자동차공학과)
  • Received : 2016.02.05
  • Accepted : 2016.02.24
  • Published : 2016.03.31
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Abstract

This paper presents the fabrication and evaluation of the novel drag force type air flowmeter using MEMS technologies for the vehicle applications. To obtain the air drag force, the flowmeter utilized the curved beam structure, which was realized by the difference of residual stress between the silicon oxide layer and the silicon nitride layer. The paddle structure was applied for the maximum air drag force, and the dual-beam was adapted to prevent distortion. The basic experiments were performed in the wind tunnel, and the stable outputs were obtained. The device was applied to the internal combustion engine, and the results were compared with the HI-DS output where the convection thermal flowmeter was used as the reference sensor. The results indicated that the comparable resolutions and response times were obtained under the various engine speeds.

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References

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