한국기계가공학회지 (Journal of the Korean Society of Manufacturing Process Engineers)

  • 제15권5호
  • /
  • Pages.100-108
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  • 2016
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  • 1598-6721(pISSN)
  • /
  • 2288-0771(eISSN)
한국기계가공학회 (The Korean Society of Manufacturing Process Engineers)
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SAW-ED 시스템을 이용한 유/무기 소재 증착에 관한 연구

A Study on Organic/Inorganic Materials Deposition Using SAW-ED System

  • 투고 : 2016.07.15
  • 심사 : 2016.09.05
  • 발행 : 2016.10.31
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초록

In various industries, many researches studies have been done in using nano thin film fabrication technology. In the field of printed electronics, various electronic devices can be fabricated using a direct printing process of on multiple functional materials. It has the advantages of low prices, environment-friendly environmentally friendly, flexibleility, large scale, mass production produced, simple process and so on. In this study, a viable thin film fabrication technology has beenwas introduced using the surface acoustic wave mechanism for thin film deposition. Fabrication of thin films using organic, inorganic and composite of organic/inorganic materials have been were analyzed through the experimental research. In this experiment, organic material MEH:PPV, inorganic material ZnO and composite material MEH:PPV/ZnO have been depo sited as thin films.

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참고문헌

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피인용 문헌

  1. A Study on the Organic-Inorganic Multilayer Barrier Thin Films Using R2R Low-Temperature Atmospheric-Pressure Atomic Layer Deposition System vol.17, pp.3, 2018, https://doi.org/10.14775/ksmpe.2018.17.3.051