The Transactions of the Korean Institute of Power Electronics (전력전자학회논문지)

The Korean Institute of Power Electronics (전력전자학회)
권호 표지
DOI QR코드

DOI QR Code

A Study on Reactor Capacitance Estimation Algorithm and 5kW Plasma Power Supply Design for Linear Output Control of Wide Range

넓은 범위의 선형 출력 제어를 위한 5kW 플라즈마 전원장치 설계 및 반응기 커패시턴스 추정 알고리즘의 관한 연구

  • Received : 2016.07.08
  • Accepted : 2016.11.02
  • Published : 2016.12.20
Download PDF
⟨ Previous Next ⟩

Abstract

This work suggests a study on 5 kW plasma power supply design and reactor capacitance estimation algorithm for a wide range of linear output control to operate a plasma reactor. The suggested study is designed to use a two-stage circuit and control the full-bridge circuit of the two-stage circuit using the buck converter output voltage of the single-stage circuit. The switching frequency of the full-bridge circuit is designed to operate through high-frequency switching and obtain maximum output using LC parallel resonance. Soft switching technique(ZVS) is used to reduce the loss caused by high-frequency switching, and duty control of the buck converter is applied to control a wide range of linear output. The internal capacitance of the reactor cannot easily be extracted, and thus, the reactor cannot be operated in an optimized resonant state. To address this issue, this work designs the internal capacitance of the reactor such that estimations can be performed with the developed reactor capacitance estimation algorithm applied to the internal capacitance of the reactor. A 5 kW plasma power supply is designed for a wide range of linear output control, and the validity of the study on the reactor capacitance estimation algorithm is verified.

Keywords

References

  1. J. Y. Yun, Y. H. Shin, and K. H. Chung, "Study on a real time quantitative diagnostic technique for measuring CVD precursors," The Korean Vacuum Society, Vol. 14, No. 3, pp. 110-114, Sep. 2005.
  2. W. C. Lee and T. K. Lee, "The study on reactor parameters of atmosphere plasma power supply," The Korean Institute of Illuminating and Electrical Installation Engineers, Vol. 26, No. 6, pp. 59-65, June 2012.
  3. S. T. Jou, H. G. Jeong, and K. B. Lee, "Design of a power system with variable voltage and frequency for a plasma discharger," Power Electronics Annual Conference, pp. 386-387, July 2011.
  4. H. K. Noh, C. J. Shin, and J. Y. Lee, "A study on the optimal design of 5kW plasma discharger," The Transactions of Korean Institute of Power Electronics, Vol. 21, No. 2, pp. 150-159, Apr. 2016. https://doi.org/10.6113/TKPE.2016.21.2.150
  5. S. K. Kwon and S. P. Mun, "Development of arc welding machines DC-DC converter using a novel full-bridge soft switching PWM inverter," Journal of the Korean Institute of Illuminating and Electrical Installation Engineers, Vol. 22, No. 6, pp. 26-33, Jun. 2008.
  6. B. H. Lee and I. S. Lee, "Development of a high-capacity power supply using IGBT for plasma devices," Journal of Korean Institute of Information Technology, Vol. 11, No. 6, pp. 25-32, June 2013.
  7. C. Y. Oh, J. S. Kim, and B. K. Lee, "Design of optimal resonant frequency for series-loaded resonant DC-DC converter in EVs on-board battery charger application," The Transactions of Korean Institute of Power Electronics, Vol. 17, No. 1, pp. 77-84, Feb. 2012. https://doi.org/10.6113/TKPE.2012.17.1.77
  8. S. I. Hong and M. S. Ryu, "A study on high-frequency of series-parallel resonant inverterusing the IGBT," Power Electronics Annual Conference, pp. 110-113, Jul. 1999.
  9. Y. H. Kim, J. K. Eom, J. H. Kim, C. Y. Won, and Y. C. Jung, "Photovoltaic soft switching inverter using parallel resonant DC-link," The Transactions of Korean Institute of Power Electronics, Vol. 14, No. 3, pp. 75-78, July 2009.
  10. T. G. Kim and J. W. Kim, "Optimal design of a transformer core using DEAS," The Transaction of the Korean Institute of Electrical Engineers, Vol. 56 No. 6, pp. 1055-1063, June 2007.
  11. J. Y. Lee, K. S. Choi, and S. C. Hahn, "Eddy current loss analysis of power transformer using finite element method," The Korean Institute of Electrical Engineers, pp. 71-73, Oct. 2008.