Journal of the Korea Academia-Industrial cooperation Society (한국산학기술학회논문지)

The Korea Academia-Industrial cooperation Society (한국산학기술학회)
권호 표지
DOI QR코드

DOI QR Code

Measuring Method of Planar Displacement Referring to The Double Linear Patterns

이중화된 패턴을 참조하는 평면 변위 측정 방법

  • Park, Sung Jun (Department of Mechanical Engineering, Korea National University of Transportation) ;
  • Jung, Kwang Suk (Department of Mechanical Engineering, Korea National University of Transportation)
  • 박성준 (한국교통대학교 기계공학과) ;
  • 정광석 (한국교통대학교 기계공학과)
  • Received : 2015.04.06
  • Accepted : 2015.07.16
  • Published : 2015.07.31
Download PDF
⟨ Previous Next ⟩

Abstract

Two-dimensional displacements are obtained from the sandwiched patterns, which superpose two linearly-periodic patterns orthogonally, respectively. The transparent top pattern is identified by deflection of the laser beam due to a difference of refractivity and the opaque bottom pattern is identified by deviation of the beam intensity due to a difference of reflectance. In the sample setup, the top pattern made up of build-up film is manufactured by UV laser machining and the bottom pattern is manufactured by ultra-precision trench machining and deposition for aluminum plate. The proposed decoding method is verified experimentally using the $10{\mu}m$ equally spaced sample patterns and the devised optical system. The Korea Academia-Industrial cooperation Society.

두 개의 1차원 주기 패턴을 수직으로 중첩시켜 상하층 패턴으로부터 이축 변위 정보를 각각 디코딩할 수 있는 방법을 제안한다. 투명한 상층 패턴 판별은 굴절률차에 기인한 레이저 빔의 디플렉션 검출을 통해 이뤄지고 하층 패턴 판별은 수광 전압 차의 검출를 통해 이뤄진다. 빌드 업 필름 재질의 상층 패턴은 UV 레이저 가공에 의해 미세가공되고 그리고 알루미늄 하층 패턴은 초정밀 머시닝에 의한 트렌치 가공과 불투명 소재 증착 그리고 폴리싱 과정을 통해 제작된다. 10마이크로미터 간격으로 제작된 샘플 패턴과 이를 인코딩할 수 있는 전용 광학계에 의한 변위 측정 방법은 대면적 스테이지에 장착되어 레이저 간섭계를 이용한 측정데이터와 비교하여 검증된다.

Keywords

References

  1. A. E. Brennemann, Holic, R. L., "Magnetic and optical fluorescence position sensing for planar linear motor", Proc. of Int. Conf. on Intelligent Robots and Systems, Vol. 3, pp. 101-107, 1995. DOI: http://dx.doi.org/10.1109/iros.1995.525869
  2. S. H. Lee, K. S. Jung, "Precision displacement measurement using astigmatism", J. of Korean Society Precision Engineering, Vol. 25, No. 7, pp. 87-94, 2008.
  3. KEYENCE Corp. Application Note, .
  4. B. hnilicka, A. Besancon-voda, H. J. Schroder, G. Filardi, "Modeling the focus error characteristic of a DVD player", Proc. of the 2002 Int. Conf. on Control Application, Vol. 2, pp. 629-630, 2002.
  5. Two-dimensional encoder from Heidenhain, .
  6. W. Gao, S. Dejima, H. Yanai, K. Katakura, S. Kiyono, Y. Tomita, "A surface motor-driven planar motion stage integrated with an XYZ${\theta}$z surface encoder for precision positioning", Precision Engineering, Vol. 28, No. 3, pp. 329-337, 2004. DOI: http://dx.doi.org/10.1016/j.precisioneng.2003.12.003
  7. S. H. Lee, K. S. Jung, E. S. Park, K. B. Shim, "Surface encoder based on the Half-Shaded Square Patterns (HSSP)", Int. J. of Precision Engineering, Vol. 9, No. 3, pp. 82-84, 2008.
  8. S. Kiyono, P. Cai, W. Gao, "An angle-based position detection method for precision machines", JSME Int. J., Vol. 42, No. 1, pp. 44-48, 1999. DOI: http://dx.doi.org/10.1299/jsmec.42.44
  9. S. J. Park, K. S. Jung, Position measurement apparatus, KR Patent: 10-1249126, 2013.
  10. J. W. Kang, "Laser machining properties for high density embedded pattern of IC substrates using UV laser", MEMaster Thesis, Korea National University of Transportation, 2011.
  11. J. H. Lee, H. K. Sohn, "Ultrafast laser micro-machining technology", J. of Korean Society Precision Engineering, Vol. 27, No. 2, pp. 7-12, 2010.
  12. K. S. Jung, K. B. Shim, "Study on the air-bearing stage driven by linear induction motors", J. of Korean Society Precision Engineering, Vol. 27, No. 6, pp. 39-46, 2010.