참고문헌
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피인용 문헌
- Physical property improvement of IZTO thin films using a hafnia buffer layer vol.124, pp.1, 2018, https://doi.org/10.1007/s00339-017-1500-6
- Improvement of electrostatic damage resistance of photomasks with conductive ITO film fabricated using UAPS (UV-Assisted-Partial-Strip) method vol.58, pp.5, 2015, https://doi.org/10.1007/s43207-021-00138-0