한국입자에어로졸학회지 (Particle and aerosol research)
- 제11권4호
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- Pages.93-98
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- 2015
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- 1738-8716(pISSN)
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- 2287-8130(eISSN)
DOI QR Code
ISPM을 이용한 PECVD 공정 내 발생입자 측정 연구
Measurement of Particles Generated from PECVD Process using ISPM
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김동빈
(성균관대학교, 기계공학부) ;
- 문지훈 (한국표준과학연구원, 진공기술센터) ;
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김형우
(성균관대학교, 나노과학기술협동학부) ;
- 강병수 (한국표준과학연구원, 진공기술센터) ;
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윤주영
(한국표준과학연구원, 진공기술센터) ;
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강상우
(한국표준과학연구원, 진공기술센터) ;
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김태성
(성균관대학교, 기계공학부)
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Kim, Dongbin
(Sungkyunkwan University of Mechanical Engineering) ;
- Mun, Jihun (Vacuum Technology Center, Korea Research Institute of Standards and Science) ;
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Kim, HyeongU
(Sungkyunkwan Advanced Institute of Nano Technology, Sungkyunkwan University) ;
- Kang, Byung Soo (Vacuum Technology Center, Korea Research Institute of Standards and Science) ;
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Yun, JuYoung
(Vacuum Technology Center, Korea Research Institute of Standards and Science) ;
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Kang, SangWoo
(Vacuum Technology Center, Korea Research Institute of Standards and Science) ;
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Kim, Taesung
(Sungkyunkwan University of Mechanical Engineering)
- 투고 : 2015.06.18
- 심사 : 2015.12.27
- 발행 : 2015.12.31
초록
Particles which generated from plasma enhanced chemical vapor deposition (PECVD) during thin film deposition process can affect to the process yield. By using light extinction method, ISPM can measure particles in the large-diameter pipe (