Korean Journal of Hazardous Materials (한국위험물학회지)

Korean Institute of Hazardous Materials (한국위험물학회)
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Offsite Risk Assessment of Incidents in a Semiconductor Facility

반도체 산업설비의 사고시 사업장외에 미치는 영향평가

  • Yoon, Yeo Hong (Korea Association of Professional Safety Engineers) ;
  • Park, Kyoshik (Department of Chemical Engineering, Myongji University) ;
  • Kim, Taeok (Department of Chemical Engineering, Myongji University) ;
  • Shin, Dongmin (Department of Chemical Engineering, Myongji University)
  • 윤여홍 (한국안전전문기관협의회) ;
  • 박교식 (명지대학교 화학공학과) ;
  • 김태옥 (명지대학교 화학공학과) ;
  • 신동민 (명지대학교 화학공학과)
  • Received : 2015.05.22
  • Accepted : 2015.06.24
  • Published : 2015.06.30

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Abstract

Semiconductor industry has large number of chemical inventory and is easily exposed to chemical release incidents. Toxic release is one of the most interested area in evaluating consequence to the vicinity of industry facilities handling hazardous materials. Hydrofluoric acid is one of the typical chemical used in semiconductor facility and is selected and toxic release is evaluated to assess the risk impacted to its off-site. Accident scenarios were listed using process safety information. The scenarios having effect to the off-site were selected and assessed further according to guideline provided by Korea government. Worst case and alternative scenarios including other interested scenarios were evaluated using ALOHA. Each evaluated scenario was assessed further considering countermeasures. The results showed that the facility handling hydroflooric acid is safe enough and needed no further protections at the moment.

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