Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Development of Improved Fabrication Methods for 2-axis Electrically Levitated MEMS Gyroscope

2축 정전부양형 MEMS 자이로스코프의 향상된 제작 공정 개발

  • Seok, Seyeong (Department of Mechanical Engineering, Pohang University of Science and Technology) ;
  • Lim, Geunbae (Department of Mechanical Engineering, Pohang University of Science and Technology)
  • 석세영 (포항공과대학교 기계공학과) ;
  • 임근배 (포항공과대학교 기계공학과)
  • Received : 2015.07.31
  • Accepted : 2015.08.04
  • Published : 2015.07.31
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Abstract

This paper describes optimizing fabrication methods for 2-axis electrically levitated MEMS gyroscope. Electrostatically levitated gyroscope has very high potential of performance due to the fact that its proof mass is not mechanically bound to any other structures, but its complex structure and difficulty of fabrication holds back the research that only a few researches have been reported. In this work, fabrication method for glass-silicon-glass 3-floor structure for 2-axis electrically levitated MEMS gyroscope is presented, including simplified multi-level glass etch method utilizing photoresist attack, preventing metal diffusion by adding middle layer of metal electrode, overcoming Deep RIE limitation by separate fabrication of silicon structures and keeping the electrode safe from dicing debris.

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References

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