한국세라믹학회지 (Journal of the Korean Ceramic Society)

  • 제52권3호
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  • Pages.224-227
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  • 2015
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  • 1229-7801(pISSN)
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  • 2234-0491(eISSN)
한국세라믹학회 (The Korean Ceramic Society)
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Properties of IZTO Thin Films Deposited on PEN Substrates with Different Working Pressures

  • Park, Jong-Chan (Department of Electronic Engineering, Inha University) ;
  • Kang, Seong-Jun (Department of Electrical and Semiconductor Engineering, Chonnam National University) ;
  • Yoon, Yung-Sup (Department of Electronic Engineering, Inha University)
  • 투고 : 2015.04.06
  • 심사 : 2015.05.12
  • 발행 : 2015.05.31
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초록

In this work, the properties of Indium-Zinc-Tin-Oxide (IZTO) thin films, deposited on polyethylene naphthalate (PEN) with a $SiO_2$ buffer layer, were analyzed with different working pressures. After depositing the $SiO_2$ buffer layer on PEN substrates by plasma-enhanced chemical vapor deposition (PECVD), the IZTO thin films were deposited by RF magnetron sputtering with 1 to 7-mTorr working pressure. All the IZTO thin films show an amorphous structure, regardless of the working pressure. The best morphological, electrical, and optical properties are obtained at 3-mTorr working pressure, with a surface roughness of 2.112-nm, a sheet resistance of $8.87-{\Omega}/sq$, and a transmittance at 550-nm of 88.44%. These results indicate that IZTO thin films deposited on PEN have outstanding electrical and optical properties, and the PEN plastic substrate is a suitable material for display devices.

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참고문헌

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피인용 문헌

  1. Synthetic analysis on the IZTO thin films deposited on various plastic substrates with the buffer layer vol.28, pp.21, 2017, https://doi.org/10.1007/s10854-017-7516-z
  2. Highly Sensitive and Selective Ethanol Sensors Using Magnesium doped Indium Oxide Hollow Spheres vol.54, pp.4, 2017, https://doi.org/10.4191/kcers.2017.54.4.01
  3. Physical property improvement of IZTO thin films using a hafnia buffer layer vol.124, pp.1, 2018, https://doi.org/10.1007/s00339-017-1500-6
  4. Effects of Working Pressure on Structural and Optical Properties of HfO2 Thin Films vol.12, pp.6, 2015, https://doi.org/10.13067/jkiecs.2017.12.6.1019
  5. 공정압력이 SiO2 버퍼층을 갖는 PES 기판위에 증착한 ITZO 박막의 전기적 및 광학적 특성에 미치는 영향 vol.14, pp.5, 2015, https://doi.org/10.13067/jkiecs.2019.14.5.887