실리콘 기반 플라즈마파 트랜지스터를 이용한 테라헤르츠 발진기 및 검출기

  • 발행 : 2015.09.30

초록

키워드

참고문헌

  1. P. H. Siegel, "Terahertz technology", IEEE Trans. Microwave Theory Tech., 50(3), pp. 910-928, Mar. 2002. https://doi.org/10.1109/22.989974
  2. V. Ryzhii, M. S. Shur, "Plasma wave electronics devices", Semiconductor Device Research Symposium, pp. 200-201, Dec. 2004.
  3. W. Knap, M. Dyakonov and T. Otsuji, "Field effect transistors for terahertz detection: Physics and first imaging applications", J. Infrared Millimeter Terahertz Waves, 30, p. 1319, 2009.
  4. N. Dyakonova, A. El Fatimy, J. Usakowski, W. Knap, M. I. Dyakonov, M. -A. Poisson, E. Morvan, S. Bollaert, A. Schepetov, Y. Roelens, Ch. Gaquiere, D. Theron and A. Cappy, "Room-temperature terahertz emission from nanometer field-effect transistors", Appl. Phys. Lett., 88, pp. 141906-1-141906-3, 2006.
  5. S. Boubanga-Tombet, F. Teppe, J. Torres, A. El Moutaouakil, D. Coquillat, N. Dyakonova, C. Consejo, P. Arcade, P. Nouvel, H. Marinchio, T. Laurent, C. Palermo, A. Penarier, T. Otsuji, L., Varani and W. Knap, "Room temperature coherent and voltage tunable terahertz emission from nanometer-sized field effect transistors", Appl. Phys. Lett., 97, 2010, Art. ID 262108.
  6. T. Onishi, T. Tanigawa and S. Takigawa, "High power terahertz emission from a single gate AlGaN/GaN field effect transistor with periodic Ohmic contacts for plasmon coupling", Appl. Phys. Lett., 97, pp. 092117-1-092117-3, 2010.
  7. F. Schuster, D. Coquillat, H. Videlier, M. Sakowicz, F. Teppe, L. Dussopt, B. Giffard, T. Skotnicki and W. Knap, "Broadband terahertz imaging with highly sensitive silicon CMOS detectors", Opt. Express, 19(8), pp. 7827-7832, Apr. 2011. https://doi.org/10.1364/OE.19.007827
  8. A. Lisauskas, S. Boppel, J. Matukas, V. Palenskis, L. Minkevicius, G. Valusis, P. Haring-Bolivar and H. G. Roskos, "Terahertz responsivity and low-frequency noise in biased silicon field-effect transistors", Appl. Phys. Lett., 102(15), pp. 153505-1-153505-4, Apr. 2013.
  9. M. W. Ryu, K. S. Kim, K. Park, J. -R. Yang, S. -T. Han and K. R. Kim, "Performance enhancement of plasmonic sub-terahertz detector based on antenna integrated low-impedance silicon MOSFET", IEEE Electron Devices Lett., 36(3), pp. 220-222, Mar. 2015. https://doi.org/10.1109/LED.2015.2394446
  10. M. Dyakonov, M. Shur, "Shallow water analogy for a ballistic field effect transistor: New mechanism of plasma wave generation by DC current", Phys. Rev. Lett., 71(15), pp. 2465-2468, Oct. 1993. https://doi.org/10.1103/PhysRevLett.71.2465
  11. M. V. Cheremisin, M. I. Dyakonov, M. S. Shur and G. Samsonidze, "Influence of electron scattering on current instability in field effect transistors", Solid-State Electron., 42(9), pp. 1737-1742, 1998. https://doi.org/10.1016/S0038-1101(98)00133-6
  12. M. V. Cheremisin, G. G. Samsonidze, "Current instability and single-mode THz generation in ungated two-dimensional electron gas", Solid-State Electron.: Short Communication, 52, pp. 338-340, 2008. https://doi.org/10.1016/j.sse.2007.09.002
  13. M. I. Dyakonov, "Boundary instability of a two-dimensionalelectron fluid", Semicond., 42, pp. 984-988, 2008. https://doi.org/10.1134/S1063782608080186
  14. O. Sydoruk, "Drifting plasmons in open two-dimensional channels: Modal analysis", J. Phys. D: Appl. Phys., 46, pp. 135103-1-135103-8, 2013.
  15. J. Y. Park, S. -H. Kim, S. -M. Hong and K. R. Kim, "Physical analysis and design of resonant plasma-wave transistors for terahertz emitters", IEEE Trans. THz Sci. Technol., 5(2), pp. 1-7, Mar. 2015. https://doi.org/10.1109/TTHZ.2014.2378471
  16. J. Y. Park, S.-H. Kim, Y.-K. Choi, S. Hong, S.-G. Lee and K. R. Kim, "Possibility and design of resonant terahertz emitters based on nanoscale strained silicon plasma wave transistors with enhanced mobility", Jpn. J. Appl. Phys., 53, 2014. Art. ID 06JE08.
  17. S. Takagi, A. Toriumi, M. Iwase and H. Tango, "On the oniversality of inversion layer mobility in Si MOSFET's: Part II-effects of surface orientation", IEEE Trans. Electron Devices, 41(12), pp. 2363-2368, Dec. 1994. https://doi.org/10.1109/16.337450
  18. W. Xiong, C. R. Cleavelin, P. Kohli, C. Huffman, T. Schulz, K. Schruefer, G. Gebara, K. Mathews, P. Patruno, Y. M. L. Vaillant, I. Cayrefourcq, M. Kennard, K. Shin and T. J. K. Liu, "Impact of strained silicon-on-insulator (sSOI) substrate on FinFET mobility", IEEE Electron Device Lett., 27(7), pp. 612-614, Jul. 2006. https://doi.org/10.1109/LED.2006.877714
  19. F. Schaffler, "High-mobility Si and Ge structures", Semicond. Sci. Technol., 12, pp. 1515-1549, Aug. 1997. https://doi.org/10.1088/0268-1242/12/12/001
  20. M. Dyakonov, M. Shur, "Detection, mixing, and frequency multiplication of terahertz radiation by two-dimensional electronic fluid", IEEE Trans. Electron. Devices, 43 (3), pp. 380-387, Mar. 1996. https://doi.org/10.1109/16.485650
  21. R. Al. Hadi, H. Sherry, J. Grzyb, Y. Zhao, W. Förster, H. M. Keller, A. Cathelin, A. Kaiser and U. R. Pfeiffer, "A 1 k-pixel video camera for 0.7-1.1 terhartz imaging applications in 65-nm CMOS", IEEE J. Solid-State Circuits, 42 (12), pp. 2999-3012, Dec. 2012.
  22. S. Domingues, D. Perenzoni, V. Giliberti, A. Di. Gaspare, M. Ortolani, M. Perenzoni and D. Stoppa, "Analysis of CMOS 0.13 mm test structures for 0.6 to 1.5 THz imaging", IRMMW-THz2013, pp. 1-2, Sep. 2013.
  23. S. M. Rahman, Z. Jiang, Y. Xie, H. Xing, P. Fay and L. Liu, "Terahertz focal plane arrays employing heterostructure backward diodes integrated with folded dipole antennas", IEEE MTT-S int. Microw. Symp. Dig., pp. 1-4, Jun. 2013.
  24. S. Nahar, A. Gutin, A. Muraviev, I. Wilke, M. Shur and M. Hella, "Terahertz detection using on chip patch and dipole antenna-coupled GaAs high electron mobility transistors", IEEE MTT-S Int. Microw. Symp. Dig., pp. 1-4, Jun. 2014.
  25. R. Tauk, F. Teppe, S. Boubanga, D. Coquillat and W. Knap, "Plasma wave detection of terahertz radiation by silicon field effects transistors: Responsivity and noise equivalent power", Appl. Phys. Lett., 89, 253511, 2006. https://doi.org/10.1063/1.2410215
  26. M. W. Ryu, J. S. Lee, K. Park, W.-K. Park, S.-T. Han and K. R. Kim, "Photoresponse enhancement of plasmonic terahertz wave detector based on asymmetric silicon MOSFETs with antenna integration", Jpn. J. Appl. Phys., 53(4S), pp. 04EJ05-1-04EJ05-4, Apr. 2014.
  27. D. M. Pozar, Microwave Engineering, Wiley, 2005, pp. 73-79.
  28. E. Ojefors, U. R. Pfeiffer, A. Lisauskas and H. G. Roskos, "A 0.65 THz focal-plane array in a quarter-micron CMOS process technology", IEEE J. Solid-State Circuits, 44(7), pp.1968-1976, Jul. 2009. https://doi.org/10.1109/JSSC.2009.2021911
  29. U. R. Pfeiffer, J. Grzyb, H. Sherry, A. Cathelin and A. Kaiser, "Toward low-NEP room-temperature THz MOSFET direct detectors in CMOS technology", IRMMW-THz 2013, pp. 1-2, Sep. 2013.