한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제32권1호
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  • Pages.107-111
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  • 2015
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  • 1225-9071(pISSN)
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  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
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Parallelogram형 Flexure Hinge 에 의한 Motion Stage 의 최적 설계

Optimal Design for Parallelogram Type Flexure Hinge

  • 최주용 (경성대학교 메카트로닉스공학과) ;
  • 엄상인 (동경공업대학 정밀공학연구소) ;
  • 김정현 (경성대학교 메카트로닉스공학과)
  • Choi, Ju Yong (Department of Mechatronics Engineering, Kyunsung University) ;
  • Eom, Sang In (Precision and Intelligence Lab., Tokyo Institute of Technology) ;
  • Kim, Jung Hyun (Department of Mechatronics Engineering, Kyunsung University)
  • 투고 : 2013.08.13
  • 심사 : 2014.10.11
  • 발행 : 2015.01.01
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초록

This paper proposes an optimal design for a precision motion stage employing a parallelogram flexure hinge. The voltage applied to the piezo element produces motion that is amplified through a 3-stage amplification structure. Especially, instead of the generally used conic section flexure hinge a parallelogram shaped flexure hinge is used that improves the flexibility of the lever. An Finite Element Analysis is performed on each motion stage lever where optimal design was achieved using Response Surface Methodology(RSM).

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참고문헌

  1. Lobontiu, N., Paine, J. S., Garcia, E., and Goldfarb, M., "Design of Symmetric Conic-Section Flexure Hinges based on Closed-form Compliance Equations," Mechanism and Machine Theory, Vol. 37, No. 5, pp. 477-498, 2002. https://doi.org/10.1016/S0094-114X(02)00002-2
  2. Jouaneh, M. and Yang, R., "Modeling of Flexure-Hinge Type Lever Mechanisms," Precision Engineering, Vol. 27, No. 4, pp. 407-418, 2003. https://doi.org/10.1016/S0141-6359(03)00045-X
  3. Gao, P., Swei, S.-M., and Yuan, Z., "A New Piezodriven Precision Micropositioning Stage Utilizing Flexure Hinges," Nanotechnology, Vol. 10, No. 4, p. 394, 1999. https://doi.org/10.1088/0957-4484/10/4/306
  4. De Bona, F. and Munteanu, M. G., "Optimized Flexural Hinges for Compliant Micromechanisms," Analog integrated circuits and signal processing, Vol. 44, No. 2, pp. 163-174, 2005. https://doi.org/10.1007/s10470-005-2597-7
  5. Madhab, G. B., "A GA-based Optimization of Compliant Micro-Manipulator," in Towards synthesis of micro-/nano-systems, pp. 319-320, Springer, 2007.
  6. Scire, F. E. and Teague, E. C., "Piezodriven 50-${\mu}m$ Range Stage with Subnanometer Resolution," Review of Scientific Instruments, Vol. 49, No. 12, pp. 1735-1740, 1978. https://doi.org/10.1063/1.1135327
  7. Choi, S., Han, S., and Lee, Y., "Fine Motion Control of a Moving Stage using a Piezoactuator Associated with a Displacement Amplifier," Smart Materials and Structures, Vol. 14, No. 1, p. 222, 2005. https://doi.org/10.1088/0964-1726/14/1/022
  8. Kang, B. H., Ting-Yung Wen, J., Dagalakis, N. G., and Gorman, J. J., "Analysis and Design of Parallel Mechanisms with Flexure Joints," IEEE Transactions on Robotics, Vol. 21, No. 6, pp. 1179-1185, 2005. https://doi.org/10.1109/TRO.2005.855989
  9. Kim, J. H., "Design of Piezo driven Motion Stage using Novel Cross Hinge Structure," J. of Korean Soc. of Mechanical Technology, Vol. 14, No. 1, pp. 7-11, 2012. https://doi.org/10.17958/ksmt.14.1.201202.7
  10. Shin, H. P., "Design of a 6-DOF Stage for Precision Positioning and Large Force Generation," J. Korean Soc. Precis. Eng., Vol. 30, No. 1, pp. 105-112, 2013. https://doi.org/10.7736/KSPE.2013.30.1.105