The Transactions of the Korean Institute of Electrical Engineers P (전기학회논문지P)

The Korean Institute of Electrical Engineers (대한전기학회)
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Ionization and Diffusion Coefficients in CH4 Gas by Simulation

시뮬레이션에 의한 CH4 기체의 전리 및 확산계수

  • 김상남 (인천대학교 전기공학과)
  • Received : 2014.11.13
  • Accepted : 2014.11.25
  • Published : 2014.12.01
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Abstract

This paper describes the information for quantitative simulation of weakly ionized plasma. We must grasp the meaning of the plasma state condition to utilize engineering application and to understand materials of plasma state. Using quantitative simulations of weakly ionized plasma, we can analyze gas characteristic. In this paper, the electron Ionization and diffusion Coefficients in $CH_4$ has been analysed over the E/N range 0.1~300[Td], at the 300[$^{\circ}K$] by the two term approximation Boltzmann equation method and Monte Carlo Simulation. Boltzmann equation method has also been used to predict swarm parameter using the same cross sections as input. The behavior of electron has been calculated to give swarm parameter for the electron energy distribution function has been analysed in $CH_4$ at E/N=10, 100 for a case of the equilibrium region in the mean energy. A set of electron collision cross section has been assembled and used in Monte Carlo simulation to predict values of swarm parameters. The result of Boltzmann equation and Monte Carlo Simulation has been compared with experimental data by Ohmori, Lucas and Carter. The swarm parameter from the swarm study are expected to sever as a critical test of current theories of low energy scattering by atoms and molecules.

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References

  1. Huxley L G H and Crompton R W "The Diffusion and Drift of Electrons in gases"(New York:Wiley) 1974
  2. Y Ohmori, K Kitamori, H Tagashira "Boltzmann equation analysis of electron swarm behavior in Methane" The Institute of Physics. 437-455 1986
  3. Rubinstein, L. "Simulation and Monte Carlo Method", John Wiley, New York. 1981
  4. H. Itoh and T. Musha "Monte Carlo Calculations of Motions in Helium", J.Phys. soc. Japan, Vol.15, No. 9, pp.1675-1680, 1960. https://doi.org/10.1143/JPSJ.15.1675
  5. R. W. L. Thomas, and W. R. L. Thomas, "Monte Carlo Simulation of electrical discharge in gases", J. Phys. B. Vol.2, pp.562-570, 1969. https://doi.org/10.1088/0022-3700/2/5/309
  6. S. R. Hunter, J. G. Carter. "Electron transport measurements in methane using an improved pulsed Townsend technique" J. Appl. Phys.60. 1986
  7. L. E. Kline, and W. E. Bies. "Measurements of swarm parameters and derived electron collision cross sections in methane", J. Appl. Phys. 65. 3311-3323. 1989. https://doi.org/10.1063/1.342642
  8. G. N. Haddad "Low Energy Electron Collision Cross Sections for Methane" Aust. J. phys. 38. 677-85. 1985 https://doi.org/10.1071/PH850677
  9. M. G. Curtis, Isobel C. Walker and K. J. Mathieson, "Electron Swarm Characteristic Energies($Dr/{\mu}$) in Tetrafluoro methane($CF_4$) at Low E/N", IOP Publishing Ltd, pp.1271-1274, 1988.
  10. Philip E. Luft, "Description of a Backward prolongation program for computing transport coefficients", JILA, Information center report, No.19, 1975.
  11. Y Ohmori, K Kitamori, H Tagashira "Boltzmann equation analysis of electron swarm behavior in Methane" The Institute of Physics. 437-455 1986
  12. S. A. J. Al-Amin and J. Lucas, "Electron swarm parameters in oxygen and methane", J. Phys. D:Appl. 18. pp. 1781-1794, 1985. https://doi.org/10.1088/0022-3727/18/9/009
  13. J. W Coburn and H. F Winter. "Plasma etching -A discussion of Mechanisms"J. Vac. Sci Technol. vol. 16, pp. 391-403. 1979 https://doi.org/10.1116/1.569958
  14. S N Kim, "Ionization and Attachment Coefficients in $CF_4,\;CH_4$, Ar Mixtures Gas" 61P-1-4, KIEE, pp13-18, 2012
  15. S. N. Kim, "Electron Energy Distribution function in $CH_4$ gas by MCSBEq" 62P-1-4, KIEE, pp. 18-22, 2013