초록
It is a common sense that water is an old offender crashing our dream of achieving a good vacuum in an early time. Various techniques for accelerating the removal of water have been developed and utilized. However, we generally are not skilled in treating the water pumping in a physically proper manner. We are rather used to handle the situation of the water pumping just like considering a conventional air pumping. Under such an erroneous approach, we cannot help making an overestimation on the pumping capability of our vacuum system, and it leads to a big mismatch between the real operation timing and the planned process schedule. In this article, some main points concerning with the subject that a vacuum pumping is really a water pumping will be discussed.
