한국재료학회지 (Korean Journal of Materials Research)

  • 제24권10호
  • /
  • Pages.532-537
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  • 2014
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  • 1225-0562(pISSN)
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  • 2287-7258(eISSN)
한국재료학회 (Materials Research Society of Korea)
권호 표지
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Pd 촉매금속의 표면형상 변형에 의한 고감도 MEMS 형 마이크로 수소가스 센서 제조공정

Highly Sensitive MEMS-Type Micro Sensor for Hydrogen Gas Detection by Modifying the Surface Morphology of Pd Catalytic Metal

  • 김정식 (서울시립대학교 신소재공학과) ;
  • 김범준 (서울시립대학교 신소재공학과)
  • Kim, Jung-Sik (Department of Materials Science and Engineering, The University of Seoul) ;
  • Kim, Bum-Joon (Department of Materials Science and Engineering, The University of Seoul)
  • 투고 : 2014.07.07
  • 심사 : 2014.09.11
  • 발행 : 2014.10.27
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초록

In this study, highly sensitive hydrogen micro gas sensors of the multi-layer and micro-heater type were designed and fabricated using the micro electro mechanical system (MEMS) process and palladium catalytic metal. The dimensions of the fabricated hydrogen gas sensor were about $5mm{\times}4mm$ and the sensing layer of palladium metal was deposited in the middle of the device. The sensing palladium films were modified to be nano-honeycomb and nano-hemisphere structures using an anodic aluminum oxide (AAO) template and nano-sized polystyrene beads, respectively. The sensitivities (Rs), which are the ratio of the relative resistance were significantly improved and reached levels of 0.783% and 1.045 % with 2,000 ppm H2 at $70^{\circ}C$ for nano-honeycomb and nano-hemisphere structured Pd films, respectively, on the other hand, the sensitivity was 0.638% for the plain Pd thin film. The improvement of sensitivities for the nano-honeycomb and nano-hemisphere structured Pd films with respect to the plain Pd-thin film was thought to be due to the nanoporous surface topographies of AAO and nano-sized polystyrene beads.

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