Laser Solutions (한국레이저가공학회지)
- Volume 17 Issue 3
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- Pages.19-23
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- 2014
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- 1229-0963(pISSN)
Direct UV laser projection ablation to engrave 6㎛-wide patterns in a buildup film
빌드업 필름의 선폭 6㎛급 패턴 가공을 위한 직접식 UV 레이저 프로젝션 애블레이션
- Sohn, Hyonkee (Department of Laser & Electron-beam Application, KIMM) ;
- Park, Jong-Sig (Applied Optics Team, LEES Optical System Inc.) ;
- Jeong, Jeong-Su (R&D Division, QMC Co., Ltd.) ;
- Shin, Dong-Sig (Department of Laser & Electron-beam Application, KIMM) ;
- Choi, Jiyeon (Department of Laser & Electron-beam Application, KIMM)
- 손현기 (한국기계연구원 광응용기게연구실) ;
- 박종식 ((주)리스광시스템 기술부설연구소) ;
- 정수정 ((주)큐엠씨 연구소) ;
- 신동식 (한국기계연구원 광응용기게연구실) ;
- 최지연 (한국기계연구원 광응용기게연구실)
- Received : 2014.09.22
- Accepted : 2013.09.26
- Published : 2014.09.30
Abstract
To directly engrave circuit-line patterns as wide as
Keywords