Journal of the Microelectronics and Packaging Society (마이크로전자및패키징학회지)

The Korean Microelectronics and Packaging Society (한국마이크로전자및패키징학회)
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Thermal Assisted UV-Ozone Treatment to Improve Reliability of Ag Nanoparticle Thin Films

  • Lee, Inhwa (Department of Mechanical Engineering, KAIST) ;
  • Kim, Taek-Soo (Department of Mechanical Engineering, KAIST)
  • Received : 2013.09.13
  • Accepted : 2014.03.02
  • Published : 2014.03.30
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Abstract

We employed UV-Ozone treatment method for the fabrication of dense and highly conductive nanoparticle thin films. We demonstrated the UV-Ozone treatment effect on the silver nanoparticle thin films as a function of time and temperature. The capping layers of nanoparticles were decomposed after UV-Ozone treatment and dense nanoparticle thin films were obtained. Moreover, electrical and mechanical properties of the thin films after UV-Ozone treatment were measured by using resistance measurements under tension in an in-situ tensile tester. The initial resistance of nanoparticle thin films was decreased by 82.6% with optimized UV-Ozone treatment condition of $150^{\circ}C$ for 20 minutes.

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References

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