Transactions of the Society of Information Storage Systems (정보저장시스템학회논문집)

The Society of Information Storage Systems (정보저장시스템학회)
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Improving nano gap control using frequency adaptive peak filter in Solid Immersion Lens-based plasmonic lithography

SIL 기반 플라즈모닉 리소그래피에서 주파수 적응형 필터를 이용한 나노간극 제어의 성능향상

  • Choi, Guk-Jong (School of Mechanical Engineering, Yonsei Univ.) ;
  • Lim, Geon (School of Mechanical Engineering, Yonsei Univ.) ;
  • Park, No-Cheol (School of Mechanical Engineering, Yonsei Univ.)
  • Received : 2014.03.13
  • Accepted : 2014.03.21
  • Published : 2014.03.25
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Abstract

Plasmonic lithography is the latest technique to overcome diffraction limit of previous optical lithography. In the plasmonic lithography, the nano gap between nano metal wave guide and photoresist should be in sub-wavelength region. SIL-based plasmonic lithography is the one of the solutions to maintain small air gap. However, the nano gap control is so sensitive that a little disturbance is able to have a large effect on the nano gap control. So, we analyzed the characteristics of disturbance, and then modified the previous controller to suppress the disturbance. We applied two peak filters which were fixed one and adaptively changeable one. We experimentally confirmed the improvement of the nano gap control, which reduced nano gap error by 30 %. The proposed control will improve the quality of lithography pattern.

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References

  1. Srituravanich, W., Pan, L., Wang, Y., Sun, C., Bogy, D. B., & Zhang, X., 2008, "Flying plasmonic lens in the near field for high-speed nanolithography", Nature Nanotechnology, Vol.3, No.12, pp. 733-737 https://doi.org/10.1038/nnano.2008.303
  2. Kim, Y., Kim, S., Jung, H., Lee, E., & Hahn, J. W., 2009, "Plasmonic nano lithography with a high scan speed contact probe", Opt. Express, Vol.17, No.22, pp. 19476-19485. https://doi.org/10.1364/OE.17.019476
  3. Kim, T., Lee, W. S., Joe, H. E., Lim, G., Choi, G. J., Gang, M. G., ... & Park, N. C., 2012, "High-speed plasmonic nanolithography with a solid immersion lens-based plasmonic optical head", Applied Physics Letters, Vol.101, No.16, 161109-161109. https://doi.org/10.1063/1.4760263
  4. Gao, W., Arai, Y., Shibuya, A., Kiyono, S., & Park, C. H., 2006, "Measurement of multi-degree-offreedom error motions of a precision linear airbearing stage", Precision engineering, Vol.30, No.1, pp. 96-103. https://doi.org/10.1016/j.precisioneng.2005.06.003
  5. Hung, J. P., 2009, "Load effect on the vibration characteristics of a stage with rolling guides. Journal of Mechanical Science and Technology", Vol.23, No.1, 89-99. https://doi.org/10.1007/s12206-008-0925-4
  6. Hong, F., & Du, C., 2010, "Stable peak filtering method to reject high frequency disturbance in hard disk drives", Journal of Advanced Mechanical Design, Systems, and Manufacturing, Vol.4, No.1, pp. 119-129. https://doi.org/10.1299/jamdsm.4.119
  7. Xu, J. X., Huang, D., Venkataramanan, V., & Huynh, T. T., 2012, "Adaptive compensation of contact-induced vibration in high density HDD servo systems using peak filter method", In Industrial Electronics (ISIE), 2012 IEEE International Symposium, pp. 797-802