DOI QR코드

DOI QR Code

A Study on Displacement Measurement by A Laser Interferometry using Common-path Fiber-optical Devices

  • Lee, Seok-Soon (School of Mechanical Engineering, ERI, Gyeongsang National University) ;
  • Lee, Dong-Wook (School of Mechanical Engineering, ERI, Gyeongsang National University) ;
  • Park, Min-Hyeok (School of Mechanical Engineering, ERI, Gyeongsang National University) ;
  • Choi, Jin-Gyu (School of Mechanical Engineering, ERI, Gyeongsang National University) ;
  • Nam, Kwang-Sik (School of Mechanical Engineering, ERI, Gyeongsang National University) ;
  • Zhao, Shang (School of Mechanical Engineering, ERI, Gyeongsang National University)
  • Received : 2014.03.27
  • Accepted : 2014.06.26
  • Published : 2014.06.30

Abstract

A displacement measurement system that uses fiber-optical common-path interferometry has been developed. The system includes fiber-optic devices and a collimator attached to a linear translation stage. The interferometry effect was detected with a photodetector whose signal was measured on an oscilloscope. Experiments showed that vibration of the stage disturbed the signal by causing nanoscale interference. Under stable conditions, the measured distance was the almost the same as the value calculated from the linear translation stage parameters.

Keywords